Optimization of Nafion polymer electrolyte membrane design and microfabrication
Marland, Jamie R.K. and Moore, Fiona and Dunare, Camelia and Tsiamis, Andreas and Gonzalez-Fernandez, Eva and Blair, Ewen O. and Smith, Stewart and Terry, Jonathan G. and Murray, Alan F. and Walton, Anthony J. (2020) Optimization of Nafion polymer electrolyte membrane design and microfabrication. IEEE Transactions on Semiconductor Manufacturing, 33 (2). pp. 196-201. ISSN 0894-6507
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Abstract
Nafion is a solid electrolyte polymer that can be used as a sensor membrane in microfabricated electrochemical oxygen sensors. It allows ions to be transported between the sensor electrodes and removes the need for a liquid electrolyte. Here we used a series of small square Nafion test structures, fabricated on a variety of materials using standard thin-film patterning techniques, to optimize the design and processing of Nafion membranes. Measurements showed that the choice of photoresist developer is critical. Use of diluted MF-26A developer provided the most effective and manufacturable process. The underlying material also had an influence on robustness, with silicon dioxide and platinum giving the longest membrane lifetime under simulated conditions of use. Membrane size had no clear effect on lifetime, and under optimal processing conditions there were minimal failures even under continuous mechanical agitation for up to six weeks. We also developed test electrodes covered by Nafion, and showed that they were effective at supporting electrochemical oxygen detection.
Creators(s): |
Marland, Jamie R.K., Moore, Fiona, Dunare, Camelia, Tsiamis, Andreas, Gonzalez-Fernandez, Eva, Blair, Ewen O. ![]() | Item type: | Article |
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ID code: | 72092 |
Notes: | © 2020 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. |
Keywords: | biomedical monitoring, electrochemical devices, membranes, micromachining, microsensors, oxygen, thin film devices, Electrical engineering. Electronics Nuclear engineering, Electronic, Optical and Magnetic Materials, Condensed Matter Physics, Industrial and Manufacturing Engineering, Electrical and Electronic Engineering |
Subjects: | Technology > Electrical engineering. Electronics Nuclear engineering |
Department: | Faculty of Engineering > Biomedical Engineering |
Depositing user: | Pure Administrator |
Date deposited: | 17 Apr 2020 13:54 |
Last modified: | 01 Jan 2021 13:35 |
Related URLs: | |
URI: | https://strathprints.strath.ac.uk/id/eprint/72092 |
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