Microscale automated alignment and spatial tracking through structured illumination

Stonehouse, Mark and Blanchard, Alex and Guilhabert, Benoit and Watson, Ian M. and Gu, Erdan and Herrnsdorf, Johannes and Dawson, Martin D.; (2019) Microscale automated alignment and spatial tracking through structured illumination. In: 2019 IEEE Photonics Conference (IPC). IEEE, USA. ISBN 9781728106151

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    Abstract

    We present a tracking and alignment capability for use in mask-less lithography systems. Through the use of micropixellated light emitting diode (LED) arrays, fluorescent clusters can be identified and used as alignment markers at micrometer scale.