Microscale automated alignment and spatial tracking through structured illumination

Stonehouse, Mark and Blanchard, Alex and Guilhabert, Benoit and Watson, Ian M. and Gu, Erdan and Herrnsdorf, Johannes and Dawson, Martin D.; (2019) Microscale automated alignment and spatial tracking through structured illumination. In: 2019 IEEE Photonics Conference (IPC). IEEE, USA. ISBN 9781728106151 (https://doi.org/10.1109/IPCon.2019.8908309)

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Abstract

We present a tracking and alignment capability for use in mask-less lithography systems. Through the use of micropixellated light emitting diode (LED) arrays, fluorescent clusters can be identified and used as alignment markers at micrometer scale.

ORCID iDs

Guilhabert, Benoit ORCID: https://orcid.org/0000-0002-3986-8566

Watson, Ian M. ORCID: https://orcid.org/0000-0002-8797-3993

Gu, Erdan ORCID: https://orcid.org/0000-0002-7607-9902

Herrnsdorf, Johannes ORCID: https://orcid.org/0000-0002-3856-5782

Dawson, Martin D. ORCID: https://orcid.org/0000-0002-6639-2989

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• Item metadata

  Item type:	Book Section
  ID code:	70828
  Dates:	Date Event 21 November 2019 Published 27 June 2019 Accepted
  Notes:	© 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
  Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering
  Department:	Faculty of Science > Physics Faculty of Science > Physics > Institute of Photonics Technology and Innovation Centre > Photonics
  Depositing user:	Pure Administrator
  Date deposited:	12 Dec 2019 09:48
  Last modified:	20 Nov 2024 01:32
  URI:	https://strathprints.strath.ac.uk/id/eprint/70828