Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication

Dunare, C. and Marland, J.R.K. and Blair, E.O. and Tsiamis, A. and Moore, F. and Terry, J.G. and Walton, A.J. and Smith, S.; (2019) Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication. In: 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, JPN, pp. 58-63. ISBN 9781728114668

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    Abstract

    Robust and repeatable processes are required to fabricate reference electrodes for micro-scale integrated electrochemical sensors. One method for this is to produce a “silver/silver chloride” (Ag/Agel) electrode through chemical chlorination of a thin film silver layer. This paper presents test structures, which can electrically characterise the process to aid process development and in-line control of the chlorination process.