Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication

Dunare, C. and Marland, J.R.K. and Blair, E.O. and Tsiamis, A. and Moore, F. and Terry, J.G. and Walton, A.J. and Smith, S. (2019) Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication. In: 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, Piscataway, NJ, pp. 58-63. ISBN 9781728114668

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    Abstract

    Robust and repeatable processes are required to fabricate reference electrodes for micro-scale integrated electrochemical sensors. One method for this is to produce a “silver/silver chloride” (Ag/Agel) electrode through chemical chlorination of a thin film silver layer. This paper presents test structures, which can electrically characterise the process to aid process development and in-line control of the chlorination process.