Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication

Dunare, C. and Marland, J.R.K. and Blair, E.O. and Tsiamis, A. and Moore, F. and Terry, J.G. and Walton, A.J. and Smith, S.; (2019) Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication. In: 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, JPN, pp. 58-63. ISBN 9781728114668 (https://doi.org/10.1109/ICMTS.2019.8730966)

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Abstract

Robust and repeatable processes are required to fabricate reference electrodes for micro-scale integrated electrochemical sensors. One method for this is to produce a “silver/silver chloride” (Ag/Agel) electrode through chemical chlorination of a thin film silver layer. This paper presents test structures, which can electrically characterise the process to aid process development and in-line control of the chlorination process.

ORCID iDs

Dunare, C., Marland, J.R.K., Blair, E.O. ORCID logoORCID: https://orcid.org/0000-0002-1887-8001, Tsiamis, A., Moore, F., Terry, J.G., Walton, A.J. and Smith, S.;
  • Item type:Book Section
    ID code:69032
    Dates:
    Date
    Event
    6 June 2019
    Published
    17 January 2019
    Accepted
    Notes:© 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
    Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
    Department:Faculty of Engineering > Biomedical Engineering
    Depositing user: Pure Administrator
    Date deposited:25 Jul 2019 12:40
    Last modified:21 Nov 2024 01:29
    Related URLs:
    URI:https://strathprints.strath.ac.uk/id/eprint/69032
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