Thermal dynamics of 2-axis electrothermal MEMS micromirrors
Donnachie, Mark and Uttamchandani, Deepak and Bauer, Ralf (2019) Thermal dynamics of 2-axis electrothermal MEMS micromirrors. In: IEEE International conference on Optical MEMS and Nanophotonics: OMN2019, 2019-07-28 - 2019-08-01, KAIST. (In Press)
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Abstract
We present the dynamic analysis of a 2-axis electrothermal MEMS scanner, focusing on the step response times for random access imaging. The 1.2 mm diameter single layer silicon mirror shows rise times in the 10-40 ms range for angle changes of 0.4°-4.7°, while fall times are 5-15 ms for the same range, leading to the potential of advanced optimization path planning.
Author(s): | Donnachie, Mark, Uttamchandani, Deepak ![]() ![]() | Item type: | Conference or Workshop Item(Paper) |
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ID code: | 68604 |
Keywords: | electrothermal MEMS scanner, 2D micromirror, thermal dynamics, Electrical engineering. Electronics Nuclear engineering, Electrical and Electronic Engineering |
Subjects: | Technology > Electrical engineering. Electronics Nuclear engineering |
Department: | Faculty of Engineering > Electronic and Electrical Engineering |
Depositing user: | Pure Administrator |
Date deposited: | 26 Jun 2019 13:30 |
Last modified: | 07 Dec 2019 02:59 |
Related URLs: | |
URI: | https://strathprints.strath.ac.uk/id/eprint/68604 |
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