Thermal dynamics of 2-axis electrothermal MEMS micromirrors

Donnachie, Mark and Uttamchandani, Deepak and Bauer, Ralf (2019) Thermal dynamics of 2-axis electrothermal MEMS micromirrors. In: IEEE International conference on Optical MEMS and Nanophotonics: OMN2019, 2019-07-28 - 2019-08-01, KAIST. (In Press)

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    Abstract

    We present the dynamic analysis of a 2-axis electrothermal MEMS scanner, focusing on the step response times for random access imaging. The 1.2 mm diameter single layer silicon mirror shows rise times in the 10-40 ms range for angle changes of 0.4°-4.7°, while fall times are 5-15 ms for the same range, leading to the potential of advanced optimization path planning.