Thermal dynamics of 2-axis electrothermal MEMS micromirrors

Donnachie, Mark and Uttamchandani, Deepak and Bauer, Ralf (2019) Thermal dynamics of 2-axis electrothermal MEMS micromirrors. In: IEEE International conference on Optical MEMS and Nanophotonics: OMN2019, 2019-07-28 - 2019-08-01, KAIST. (In Press)

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    Abstract

    We present the dynamic analysis of a 2-axis electrothermal MEMS scanner, focusing on the step response times for random access imaging. The 1.2 mm diameter single layer silicon mirror shows rise times in the 10-40 ms range for angle changes of 0.4°-4.7°, while fall times are 5-15 ms for the same range, leading to the potential of advanced optimization path planning.

    Author(s):Donnachie, Mark, Uttamchandani, Deepak ORCID: https://orcid.org/0000-0002-2362-4874 and Bauer, Ralf ORCID: https://orcid.org/0000-0001-7927-9435
    Item type:Conference or Workshop Item(Paper)
    ID code:68604
    Keywords:electrothermal MEMS scanner, 2D micromirror, thermal dynamics, Electrical engineering. Electronics Nuclear engineering, Electrical and Electronic Engineering
    Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
    Department:Faculty of Engineering > Electronic and Electrical Engineering
    Depositing user: Pure Administrator
    Date deposited:26 Jun 2019 13:30
    Last modified:19 Sep 2019 01:37
    Related URLs:
    URI:https://strathprints.strath.ac.uk/id/eprint/68604
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