Thermal dynamics of 2-axis electrothermal MEMS micromirrors

Donnachie, Mark and Uttamchandani, Deepak and Bauer, Ralf (2019) Thermal dynamics of 2-axis electrothermal MEMS micromirrors. In: IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019), 2019-07-28 - 2019-08-01, KAIST.

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    Abstract

    We present the dynamic analysis of a 2-axis electrothermal MEMS scanner, focusing on the step response times for random access imaging. The 1.2 mm diameter single layer silicon mirror shows rise times in the 10-40 ms range for angle changes of 0.4°-4.7°, while fall times are 5-15 ms for the same range, leading to the potential of advanced optimization path planning.

    ORCID iDs

    Donnachie, Mark, Uttamchandani, Deepak ORCID logoORCID: https://orcid.org/0000-0002-2362-4874 and Bauer, Ralf ORCID logoORCID: https://orcid.org/0000-0001-7927-9435;
    • Item type:Conference or Workshop Item(Paper)
      ID code:68604
      Dates:
      Date
      Event
      9 December 2019
      Published
      3 June 2019
      Accepted
      Notes:© 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
      Keywords:electrothermal MEMS scanner, 2D micromirror, thermal dynamics, Electrical engineering. Electronics Nuclear engineering, Electrical and Electronic Engineering
      Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
      Department:Faculty of Engineering > Electronic and Electrical Engineering
      Depositing user: Pure Administrator
      Date deposited:26 Jun 2019 13:30
      Last modified:26 Mar 2021 01:17
      URI:https://strathprints.strath.ac.uk/id/eprint/68604
    CORE (COnnecting REpositories)