Fast piezoelectric scanning MEMS mirror for 1D ion adressing

Janin, Paul and Bauer, Ralf and Griffin, Paul and Riis, Erling and Uttamchandani, Deepak (2019) Fast piezoelectric scanning MEMS mirror for 1D ion adressing. In: IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019), 2019-07-28 - 2019-08-01, KAIST. (

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We present a small-scale piezoelectric MEMS micromirror, with resonant frequencies above 300 kHz for 1D scanning. The device is intended for higher frequency operation by reducing the scale of existing designs, and was fabricated using a multi-user silicon-on-insulator process. The performance of the mirror for addressing points along one axis was demonstrated using a free-space optics experimental setup.