Fast piezoelectric scanning MEMS mirror for 1D ion adressing

Janin, Paul and Bauer, Ralf and Griffin, Paul and Riis, Erling and Uttamchandani, Deepak (2019) Fast piezoelectric scanning MEMS mirror for 1D ion adressing. In: IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019), 2019-07-28 - 2019-08-01, KAIST. (https://doi.org/10.1109/OMN.2019.8925168)

[thumbnail of Janin-etal-OMN-2019-Fast-piezoelectric-scanning-MEMS-mirror-for-1D]
Preview
 Text. Filename: Janin_etal_OMN_2019_Fast_piezoelectric_scanning_MEMS_mirror_for_1D.pdf
Accepted Author Manuscript
Download (1MB)| Preview

Abstract

We present a small-scale piezoelectric MEMS micromirror, with resonant frequencies above 300 kHz for 1D scanning. The device is intended for higher frequency operation by reducing the scale of existing designs, and was fabricated using a multi-user silicon-on-insulator process. The performance of the mirror for addressing points along one axis was demonstrated using a free-space optics experimental setup.

ORCID iDs

Janin, Paul, Bauer, Ralf ORCID logoORCID: https://orcid.org/0000-0001-7927-9435, Griffin, Paul ORCID logoORCID: https://orcid.org/0000-0002-0134-7554, Riis, Erling ORCID logoORCID: https://orcid.org/0000-0002-3225-5302 and Uttamchandani, Deepak ORCID logoORCID: https://orcid.org/0000-0002-2362-4874;
  • Item type:Conference or Workshop Item(Other)
    ID code:68509
    Dates:
    Date
    Event
    9 December 2019
    Published
    3 June 2019
    Accepted
    Notes:© 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
    Keywords:optical MEMS, piezoelectric, scanning mirror, high frequency, Electrical Engineering. Electronics Nuclear Engineering, Electrical and Electronic Engineering, Atomic and Molecular Physics, and Optics
    Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
    Department:Faculty of Science > Physics
    Faculty of Engineering > Electronic and Electrical Engineering
    Depositing user: Pure Administrator
    Date deposited:18 Jun 2019 15:40
    Last modified:25 May 2023 08:48
    URI:https://strathprints.strath.ac.uk/id/eprint/68509
CORE (COnnecting REpositories)