Application of MEMS enabled excitation and detection schemes to photoacoustic imaging

Kusch, Jonas and Flockhart, Gordon and Bauer, Ralf and Uttamchandani, Deepak; (2019) Application of MEMS enabled excitation and detection schemes to photoacoustic imaging. In: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). IEEE, DEU, pp. 829-832. ISBN 9781538681046

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    Abstract

    This paper shows, for the first time, a MEMS enabled photoacoustic system, using a custom MEMS Q-switched Nd:YAG laser for generation of photoacoustic (PA) waves and a custom-built MEMS thin-film aluminium nitride piezoelectric micromachined ultrasound transducers for PA wave detection.

    ORCID iDs

    Kusch, Jonas ORCID logoORCID: https://orcid.org/0000-0003-0921-9167, Flockhart, Gordon ORCID logoORCID: https://orcid.org/0000-0002-8777-7511, Bauer, Ralf ORCID logoORCID: https://orcid.org/0000-0001-7927-9435 and Uttamchandani, Deepak ORCID logoORCID: https://orcid.org/0000-0002-2362-4874;
    • Item type:Book Section
      ID code:67687
      Dates:
      Date
      Event
      22 August 2019
      Published
      21 February 2019
      Accepted
      Notes:© 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
      Keywords:photoacoustic imaging, MEMS, piezoelectric micromachined ultrasound transducers, aluminium nitride, Electrical engineering. Electronics Nuclear engineering, Electrical and Electronic Engineering
      Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
      Department:Faculty of Engineering > Electronic and Electrical Engineering
      Faculty of Engineering
      Depositing user: Pure Administrator
      Date deposited:02 May 2019 15:32
      Last modified:06 May 2021 01:00
      URI:https://strathprints.strath.ac.uk/id/eprint/67687
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