Application of MEMS enabled excitation and detection schemes to photoacoustic imaging

Kusch, Jonas and Flockhart, Gordon and Bauer, Ralf and Uttamchandani, Deepak; (2019) Application of MEMS enabled excitation and detection schemes to photoacoustic imaging. In: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). IEEE, DEU, pp. 829-832. ISBN 9781538681046 (https://doi.org/10.1109/TRANSDUCERS.2019.8808339)

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Abstract

This paper shows, for the first time, a MEMS enabled photoacoustic system, using a custom MEMS Q-switched Nd:YAG laser for generation of photoacoustic (PA) waves and a custom-built MEMS thin-film aluminium nitride piezoelectric micromachined ultrasound transducers for PA wave detection.

ORCID iDs

Kusch, Jonas ORCID logoORCID: https://orcid.org/0000-0003-0921-9167, Flockhart, Gordon ORCID logoORCID: https://orcid.org/0000-0002-8777-7511, Bauer, Ralf ORCID logoORCID: https://orcid.org/0000-0001-7927-9435 and Uttamchandani, Deepak ORCID logoORCID: https://orcid.org/0000-0002-2362-4874;
  • Item type:Book Section
    ID code:67687
    Dates:
    Date
    Event
    22 August 2019
    Published
    21 February 2019
    Accepted
    Notes:© 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
    Keywords:photoacoustic imaging, MEMS, piezoelectric micromachined ultrasound transducers, aluminium nitride, Electrical Engineering. Electronics Nuclear Engineering, Electrical and Electronic Engineering
    Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
    Department:Faculty of Engineering > Electronic and Electrical Engineering
    Faculty of Engineering
    Depositing user: Pure Administrator
    Date deposited:02 May 2019 15:32
    Last modified:31 Jan 2023 03:19
    URI:https://strathprints.strath.ac.uk/id/eprint/67687
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