Application of MEMS enabled excitation and detection schemes to PA imaging

Kusch, Jonas and Flockhart, Gordon and Bauer, Ralf and Uttamchandani, Deepak (2019) Application of MEMS enabled excitation and detection schemes to PA imaging. In: Transducers 2019. IEEE, Piscataway, NJ.. (In Press)

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    Abstract

    This paper shows, for the first time, a MEMS enabled photoacoustic system, using a custom MEMS Q-switched Nd:YAG laser for generation of photoacoustic (PA) waves and a custom-built MEMS thin-film aluminium nitride piezoelectric micromachined ultrasound transducers for PA wave detection.