Application of MEMS enabled excitation and detection schemes to photoacoustic imaging

Kusch, Jonas and Flockhart, Gordon and Bauer, Ralf and Uttamchandani, Deepak; (2019) Application of MEMS enabled excitation and detection schemes to photoacoustic imaging. In: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). IEEE, DEU, pp. 829-832. ISBN 9781538681046

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    Abstract

    This paper shows, for the first time, a MEMS enabled photoacoustic system, using a custom MEMS Q-switched Nd:YAG laser for generation of photoacoustic (PA) waves and a custom-built MEMS thin-film aluminium nitride piezoelectric micromachined ultrasound transducers for PA wave detection.