Application of MEMS enabled excitation and detection schemes to photoacoustic imaging

Kusch, Jonas and Flockhart, Gordon and Bauer, Ralf and Uttamchandani, Deepak (2019) Application of MEMS enabled excitation and detection schemes to photoacoustic imaging. In: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). IEEE, DEU, pp. 829-832. ISBN 9781538681046

[img]
Preview
Text (Kusch-etal-Transducers2019-Application-MEMS-enabled-excitation-detection_schemes-photoacoustic-imaging)
Kusch_etal_Transducers2019_Application_MEMS_enabled_excitation_detection_schemes_photoacoustic_imaging.pdf
Accepted Author Manuscript

Download (2MB)| Preview

    Abstract

    This paper shows, for the first time, a MEMS enabled photoacoustic system, using a custom MEMS Q-switched Nd:YAG laser for generation of photoacoustic (PA) waves and a custom-built MEMS thin-film aluminium nitride piezoelectric micromachined ultrasound transducers for PA wave detection.