Application of MEMS enabled excitation and detection schemes to photoacoustic imaging
Kusch, Jonas and Flockhart, Gordon and Bauer, Ralf and Uttamchandani, Deepak; (2019) Application of MEMS enabled excitation and detection schemes to photoacoustic imaging. In: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). IEEE, DEU, pp. 829-832. ISBN 9781538681046
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Official URL: https://doi.org/10.1109/TRANSDUCERS.2019.8808339
Abstract
This paper shows, for the first time, a MEMS enabled photoacoustic system, using a custom MEMS Q-switched Nd:YAG laser for generation of photoacoustic (PA) waves and a custom-built MEMS thin-film aluminium nitride piezoelectric micromachined ultrasound transducers for PA wave detection.
Creators(s): |
Kusch, Jonas ![]() ![]() ![]() ![]() | Item type: | Book Section |
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ID code: | 67687 |
Notes: | © 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. |
Keywords: | photoacoustic imaging, MEMS, piezoelectric micromachined ultrasound transducers, aluminium nitride, Electrical engineering. Electronics Nuclear engineering, Electrical and Electronic Engineering |
Subjects: | Technology > Electrical engineering. Electronics Nuclear engineering |
Department: | Faculty of Engineering > Electronic and Electrical Engineering Faculty of Engineering |
Depositing user: | Pure Administrator |
Date deposited: | 02 May 2019 15:32 |
Last modified: | 20 Jan 2021 16:13 |
URI: | https://strathprints.strath.ac.uk/id/eprint/67687 |
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