Miniaturisation of photoacoustic sensing systems using MEMS transducer arrays and MEMS scanning mirrors

Kusch, Jonas and Flockhart, Gordon M.H. and Bauer, Ralf and Uttamchandani, Deepak; (2018) Miniaturisation of photoacoustic sensing systems using MEMS transducer arrays and MEMS scanning mirrors. In: 2018 IEEE SENSORS. IEEE, Piscataway, NJ, 1 - 3. ISBN 9781538647073

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    Abstract

    A custom-built thin film aluminium nitride MEMS ultrasound transducer and its application to photoacoustic sensing is presented. The photoacoustic signal is generated using a commercial Nd:YAG laser and, for the first time, using a high pulse repetition rate MEMS Q-switched Nd:YAG laser.