Miniaturisation of photoacoustic sensing systems using MEMS transducer arrays and MEMS scanning mirrors

Kusch, Jonas and Flockhart, Gordon M.H. and Bauer, Ralf and Uttamchandani, Deepak; (2018) Miniaturisation of photoacoustic sensing systems using MEMS transducer arrays and MEMS scanning mirrors. In: 2018 IEEE SENSORS. IEEE, Piscataway, NJ, 1 - 3. ISBN 9781538647073 (https://doi.org/10.1109/ICSENS.2018.8589899)

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Abstract

A custom-built thin film aluminium nitride MEMS ultrasound transducer and its application to photoacoustic sensing is presented. The photoacoustic signal is generated using a commercial Nd:YAG laser and, for the first time, using a high pulse repetition rate MEMS Q-switched Nd:YAG laser.

ORCID iDs

Kusch, Jonas ORCID logoORCID: https://orcid.org/0000-0003-0921-9167, Flockhart, Gordon M.H. ORCID logoORCID: https://orcid.org/0000-0002-8777-7511, Bauer, Ralf ORCID logoORCID: https://orcid.org/0000-0001-7927-9435 and Uttamchandani, Deepak ORCID logoORCID: https://orcid.org/0000-0002-2362-4874;