Miniaturisation of photoacoustic sensing systems using MEMS transducer arrays and MEMS scanning mirrors

Kusch, Jonas and Flockhart, Gordon M.H. and Bauer, Ralf and Uttamchandani, Deepak (2018) Miniaturisation of photoacoustic sensing systems using MEMS transducer arrays and MEMS scanning mirrors. In: 2018 IEEE SENSORS. IEEE, Piscataway, NJ, 1 - 3. ISBN 9781538647073

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    Abstract

    A custom-built thin film aluminium nitride MEMS ultrasound transducer and its application to photoacoustic sensing is presented. The photoacoustic signal is generated using a commercial Nd:YAG laser and, for the first time, using a high pulse repetition rate MEMS Q-switched Nd:YAG laser.