Miniaturisation of photoacoustic sensing systems using MEMS transducer arrays and MEMS scanning mirrors

Kusch, Jonas and Flockhart, Gordon M.H. and Bauer, Ralf and Uttamchandani, Deepak; (2018) Miniaturisation of photoacoustic sensing systems using MEMS transducer arrays and MEMS scanning mirrors. In: 2018 IEEE SENSORS. IEEE, Piscataway, NJ, 1 - 3. ISBN 9781538647073 (https://doi.org/10.1109/ICSENS.2018.8589899)

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Abstract

A custom-built thin film aluminium nitride MEMS ultrasound transducer and its application to photoacoustic sensing is presented. The photoacoustic signal is generated using a commercial Nd:YAG laser and, for the first time, using a high pulse repetition rate MEMS Q-switched Nd:YAG laser.

ORCID iDs

Kusch, Jonas ORCID: https://orcid.org/0000-0003-0921-9167

Flockhart, Gordon M.H. ORCID: https://orcid.org/0000-0002-8777-7511

Bauer, Ralf ORCID: https://orcid.org/0000-0001-7927-9435

Uttamchandani, Deepak ORCID: https://orcid.org/0000-0002-2362-4874

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• Item metadata

  Item type:	Book Section
  ID code:	67271
  Dates:	Date Event 27 December 2018 Published 8 October 2018 Accepted
  Notes:	© 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
  Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering
  Department:	Faculty of Engineering > Electronic and Electrical Engineering Faculty of Engineering
  Depositing user:	Pure Administrator
  Date deposited:	12 Mar 2019 12:04
  Last modified:	21 Nov 2024 01:29
  Related URLs:	Journal or Publication Event
  URI:	https://strathprints.strath.ac.uk/id/eprint/67271