Test structures for optimizing polymer electrolyte performance in a microfabricated electrochemical oxygen sensor

Marland, J. R.K. and Dunare, C. and Tsiamis, A. and González-Fernandez, E. and Blair, E.O. and Smith, S. and Terry, J. G. and Murray, A. F. and Walton, A. J.; (2017) Test structures for optimizing polymer electrolyte performance in a microfabricated electrochemical oxygen sensor. In: 2017 International Conference of Microelectronic Test Structures (ICMTS). Institute of Electrical and Electronics Engineers Inc., FRA. ISBN 978-1-5090-3616-5 (https://doi.org/10.1109/ICMTS.2017.7954280)

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Abstract

Test structures were produced for optimizing the design and fabrication of a patterned solid polymer electrolyte in an electrochemical oxygen sensor. Measurements showed that choice of photoresist developer and the underlying insulator material affected durability of the polymer structures. Test electrodes covered by the polymer were effective at supporting electrochemical oxygen detection.

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