Test structures for optimizing polymer electrolyte performance in a microfabricated electrochemical oxygen sensor

Marland, J. R.K. and Dunare, C. and Tsiamis, A. and González-Fernandez, E. and Blair, E.O. and Smith, S. and Terry, J. G. and Murray, A. F. and Walton, A. J. (2017) Test structures for optimizing polymer electrolyte performance in a microfabricated electrochemical oxygen sensor. In: 2017 International Conference of Microelectronic Test Structures (ICMTS). Institute of Electrical and Electronics Engineers Inc., FRA. ISBN 978-1-5090-3616-5

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    Abstract

    Test structures were produced for optimizing the design and fabrication of a patterned solid polymer electrolyte in an electrochemical oxygen sensor. Measurements showed that choice of photoresist developer and the underlying insulator material affected durability of the polymer structures. Test electrodes covered by the polymer were effective at supporting electrochemical oxygen detection.

    Author(s):Marland, J. R.K., Dunare, C., Tsiamis, A., González-Fernandez, E., Blair, E.O. ORCID logoORCID: https://orcid.org/0000-0002-1887-8001, Smith, S., Terry, J. G., Murray, A. F. and Walton, A. J.
    Item type:Book Section
    ID code:66104
    Keywords:test structures, polymer electrolyte, electrochemical oxygen detection, Electrical engineering. Electronics Nuclear engineering, Electrical and Electronic Engineering
    Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
    Department:Faculty of Engineering > Biomedical Engineering
    Depositing user: Pure Administrator
    Date deposited:14 Nov 2018 14:13
    Last modified:13 Feb 2020 09:16
    Related URLs:
    URI:https://strathprints.strath.ac.uk/id/eprint/66104
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