Test structures for optimizing polymer electrolyte performance in a microfabricated electrochemical oxygen sensor
Marland, J. R.K. and Dunare, C. and Tsiamis, A. and González-Fernandez, E. and Blair, E.O. and Smith, S. and Terry, J. G. and Murray, A. F. and Walton, A. J.; (2017) Test structures for optimizing polymer electrolyte performance in a microfabricated electrochemical oxygen sensor. In: 2017 International Conference of Microelectronic Test Structures (ICMTS). Institute of Electrical and Electronics Engineers Inc., FRA. ISBN 978-1-5090-3616-5
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Abstract
Test structures were produced for optimizing the design and fabrication of a patterned solid polymer electrolyte in an electrochemical oxygen sensor. Measurements showed that choice of photoresist developer and the underlying insulator material affected durability of the polymer structures. Test electrodes covered by the polymer were effective at supporting electrochemical oxygen detection.
Creators(s): |
Marland, J. R.K., Dunare, C., Tsiamis, A., González-Fernandez, E., Blair, E.O. ![]() | Item type: | Book Section |
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ID code: | 66104 |
Keywords: | test structures, polymer electrolyte, electrochemical oxygen detection, Electrical engineering. Electronics Nuclear engineering, Electrical and Electronic Engineering |
Subjects: | Technology > Electrical engineering. Electronics Nuclear engineering |
Department: | Faculty of Engineering > Biomedical Engineering |
Depositing user: | Pure Administrator |
Date deposited: | 14 Nov 2018 14:13 |
Last modified: | 01 Jan 2021 07:10 |
Related URLs: | |
URI: | https://strathprints.strath.ac.uk/id/eprint/66104 |
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