Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing

Guilhabert, B. and McPhillimy, J. and Klitis, C. and Dawson, M.D. and Sorel, M. and Strain, M.J.; (2018) Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing. In: IEEE Photonics Conference 2018. IEEE, USA. (In Press)

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    Abstract

    The vertical micro-assembly of membrane photonic devices across a range of materials is presented, including polymers, silicon and III-V semiconductors. Fully-fabricated waveguide structures are integrated with sub-100nm absolute placement accuracy. Light-emitting diodes, silicon photonics and nanowire lasers are examples of the deployment of this technique.