Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing

Guilhabert, B. and McPhillimy, J. and Klitis, C. and Dawson, M.D. and Sorel, M. and Strain, M.J. (2018) Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing. In: IEEE Photonics Conference 2018. IEEE, Piscataway, NJ. (In Press)

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    Abstract

    The vertical micro-assembly of membrane photonic devices across a range of materials is presented, including polymers, silicon and III-V semiconductors. Fully-fabricated waveguide structures are integrated with sub-100nm absolute placement accuracy. Light-emitting diodes, silicon photonics and nanowire lasers are examples of the deployment of this technique.