Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing

Guilhabert, B. and McPhillimy, J. and Klitis, C. and Dawson, M.D. and Sorel, M. and Strain, M.J.; (2018) Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing. In: IEEE Photonics Conference 2018. IEEE, USA. (In Press)

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Abstract

The vertical micro-assembly of membrane photonic devices across a range of materials is presented, including polymers, silicon and III-V semiconductors. Fully-fabricated waveguide structures are integrated with sub-100nm absolute placement accuracy. Light-emitting diodes, silicon photonics and nanowire lasers are examples of the deployment of this technique.

ORCID iDs

Guilhabert, B. ORCID logoORCID: https://orcid.org/0000-0002-3986-8566, McPhillimy, J. ORCID logoORCID: https://orcid.org/0000-0003-3415-3796, Klitis, C., Dawson, M.D. ORCID logoORCID: https://orcid.org/0000-0002-6639-2989, Sorel, M. and Strain, M.J. ORCID logoORCID: https://orcid.org/0000-0002-9752-3144;
  • Item type:Book Section
    ID code:65273
    Dates:
    Date
    Event
    17 July 2018
    Published
    17 July 2018
    Accepted
    Keywords:silicon on insulator, hybrid integrated circuits, nano positioning, Physics, Physics and Astronomy(all)
    Subjects:Science > Physics
    Department:Faculty of Science > Physics > Institute of Photonics
    Depositing user: Pure Administrator
    Date deposited:27 Aug 2018 12:11
    Last modified:18 Jan 2023 12:35
    Related URLs:
    URI:https://strathprints.strath.ac.uk/id/eprint/65273
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