Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing

Guilhabert, B. and McPhillimy, J. and Klitis, C. and Dawson, M.D. and Sorel, M. and Strain, M.J.; (2018) Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing. In: IEEE Photonics Conference 2018. IEEE, USA, pp. 1-3. ISBN 9781538653586 (https://doi.org/10.1109/IPCon.2018.8527135)

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Abstract

The vertical micro-assembly of membrane photonic devices across a range of materials is presented, including polymers, silicon and III-V semiconductors. Fully-fabricated waveguide structures are integrated with sub-100nm absolute placement accuracy. Light-emitting diodes, silicon photonics and nanowire lasers are examples of the deployment of this technique.

ORCID iDs

Guilhabert, B. ORCID logoORCID: https://orcid.org/0000-0002-3986-8566, McPhillimy, J. ORCID logoORCID: https://orcid.org/0000-0003-3415-3796, Klitis, C., Dawson, M.D. ORCID logoORCID: https://orcid.org/0000-0002-6639-2989, Sorel, M. and Strain, M.J. ORCID logoORCID: https://orcid.org/0000-0002-9752-3144;
  • Item type:Book Section
    ID code:65273
    Dates:
    Date
    Event
    8 November 2018
    Published
    17 July 2018
    Accepted
    Notes:© Copyright 2018 IEEE - All rights reserved, including rights for text and data mining and training of artificial intelligence and similar technologies. B. Guilhabert, C. Klitis, J. McPhillimy, M. Sorel, M. D. Dawson and M. J. Strain, "Nanoscale Accurate Heterogeneous Integration of Waveguide Devices by Transfer Printing," 2018 IEEE Photonics Conference (IPC), Reston, VA, USA, 2018, pp. 1-2, doi: 10.1109/IPCon.2018.8527135
    Subjects:Science > Physics
    Department:Faculty of Science > Physics > Institute of Photonics
    Depositing user: Pure Administrator
    Date deposited:27 Aug 2018 12:11
    Last modified:11 Nov 2024 15:13
    Related URLs:
    URI:https://strathprints.strath.ac.uk/id/eprint/65273
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