High precision transfer printing for hybrid integration of multi-material waveguide devices

McPhillimy, John R. and Guilhabert, Benoit and Klitis, Charalambos and May, Stuart and Dawson, Martin D. and Sorel, Marc and Strain, Michael J. (2018) High precision transfer printing for hybrid integration of multi-material waveguide devices. In: Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018, 2018-07-02 - 2018-07-05.

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    Abstract

    We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.

    Author(s):McPhillimy, John R. ORCID logoORCID: https://orcid.org/0000-0003-3415-3796, Guilhabert, Benoit ORCID logoORCID: https://orcid.org/0000-0002-3986-8566, Klitis, Charalambos, May, Stuart, Dawson, Martin D. ORCID logoORCID: https://orcid.org/0000-0002-6639-2989, Sorel, Marc and Strain, Michael J. ORCID logoORCID: https://orcid.org/0000-0002-9752-3144
    Item type:Conference or Workshop Item(Paper)
    ID code:64402
    Keywords:transfer printing technique, silicon, polymer, III-V-on-silicon, Physics, Physics and Astronomy(all)
    Subjects:Science > Physics
    Department:Faculty of Science > Physics
    Faculty of Science > Physics > Institute of Photonics
    Technology and Innovation Centre > Photonics
    Depositing user: Pure Administrator
    Date deposited:11 Jun 2018 13:46
    Last modified:02 Sep 2019 03:41
    URI:https://strathprints.strath.ac.uk/id/eprint/64402
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