High precision transfer printing for hybrid integration of multi-material waveguide devices

McPhillimy, John R. and Guilhabert, Benoit and Klitis, Charalambos and May, Stuart and Dawson, Martin D. and Sorel, Marc and Strain, Michael J. (2018) High precision transfer printing for hybrid integration of multi-material waveguide devices. In: Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018, 2018-07-02 - 2018-07-05.

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    Abstract

    We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.