High precision transfer printing for hybrid integration of multi-material waveguide devices

McPhillimy, John R. and Guilhabert, Benoit and Klitis, Charalambos and May, Stuart and Dawson, Martin D. and Sorel, Marc and Strain, Michael J. (2018) High precision transfer printing for hybrid integration of multi-material waveguide devices. In: Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018, 2018-07-02 - 2018-07-05.

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Abstract

We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.

ORCID iDs

McPhillimy, John R. ORCID: https://orcid.org/0000-0003-3415-3796

Guilhabert, Benoit ORCID: https://orcid.org/0000-0002-3986-8566

Dawson, Martin D. ORCID: https://orcid.org/0000-0002-6639-2989

Strain, Michael J. ORCID: https://orcid.org/0000-0002-9752-3144

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• Item metadata

  Item type:	Conference or Workshop Item(Paper)
  ID code:	64402
  Dates:	Date Event 5 July 2018 Published
  Keywords:	transfer printing technique, silicon, polymer, III-V-on-silicon, Physics, Physics and Astronomy(all)
  Subjects:	Science > Physics
  Department:	Faculty of Science > Physics Faculty of Science > Physics > Institute of Photonics Technology and Innovation Centre > Photonics
  Depositing user:	Pure Administrator
  Date deposited:	11 Jun 2018 13:46
  Last modified:	28 Mar 2023 10:35
  URI:	https://strathprints.strath.ac.uk/id/eprint/64402