High precision transfer printing for hybrid integration of multi-material waveguide devices
McPhillimy, John R. and Guilhabert, Benoit and Klitis, Charalambos and May, Stuart and Dawson, Martin D. and Sorel, Marc and Strain, Michael J. (2018) High precision transfer printing for hybrid integration of multi-material waveguide devices. In: Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018, 2018-07-02 - 2018-07-05.
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Abstract
We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.
ORCID iDs
McPhillimy, John R. ORCID: https://orcid.org/0000-0003-3415-3796, Guilhabert, Benoit ORCID: https://orcid.org/0000-0002-3986-8566, Klitis, Charalambos, May, Stuart, Dawson, Martin D. ORCID: https://orcid.org/0000-0002-6639-2989, Sorel, Marc and Strain, Michael J. ORCID: https://orcid.org/0000-0002-9752-3144;-
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Item type: Conference or Workshop Item(Paper) ID code: 64402 Dates: DateEvent5 July 2018PublishedSubjects: Science > Physics Department: Faculty of Science > Physics
Faculty of Science > Physics > Institute of Photonics
Technology and Innovation Centre > PhotonicsDepositing user: Pure Administrator Date deposited: 11 Jun 2018 13:46 Last modified: 18 Oct 2024 00:54 URI: https://strathprints.strath.ac.uk/id/eprint/64402
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