High precision transfer printing for hybrid integration of multi-material waveguide devices
McPhillimy, John R. and Guilhabert, Benoit and Klitis, Charalambos and May, Stuart and Dawson, Martin D. and Sorel, Marc and Strain, Michael J. (2018) High precision transfer printing for hybrid integration of multi-material waveguide devices. In: Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018, 2018-07-02 - 2018-07-05.
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Abstract
We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.
Creators(s): |
McPhillimy, John R. ![]() ![]() ![]() ![]() | Item type: | Conference or Workshop Item(Paper) |
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ID code: | 64402 |
Keywords: | transfer printing technique, silicon, polymer, III-V-on-silicon, Physics, Physics and Astronomy(all) |
Subjects: | Science > Physics |
Department: | Faculty of Science > Physics Faculty of Science > Physics > Institute of Photonics Technology and Innovation Centre > Photonics |
Depositing user: | Pure Administrator |
Date deposited: | 11 Jun 2018 13:46 |
Last modified: | 23 Jan 2021 04:53 |
URI: | https://strathprints.strath.ac.uk/id/eprint/64402 |
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