Characterization of a fast piezoelectric varifocal MEMS mirror

Janin, Paul and Bauer, Ralf and Griffin, Paul and Riis, Erling and Uttamchandani, Deepak (2018) Characterization of a fast piezoelectric varifocal MEMS mirror. In: Conference on Optical MEMS and Nanophotonics 2018, 2018-07-29 - 2018-08-02, Ecole Polyechnique Fédérale de Lausanne.

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Abstract

We present the characterization of a novel design for a varifocal MEMS mirror with piezoelectric actuation and defocus movement up to 100 kHz. The device was simulated using a finite-element method, fabricated using a multi-user silicon-oninsulator process, and its mechanical response to piezoelectric actuation evaluated through laser vibrometry and a dynamic white-light interferometer.

ORCID iDs

Bauer, Ralf ORCID: https://orcid.org/0000-0001-7927-9435

Griffin, Paul ORCID: https://orcid.org/0000-0002-0134-7554

Riis, Erling ORCID: https://orcid.org/0000-0002-3225-5302

Uttamchandani, Deepak ORCID: https://orcid.org/0000-0002-2362-4874

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• Item metadata

  Item type:	Conference or Workshop Item(Paper)
  ID code:	64393
  Dates:	Date Event 29 July 2018 Published 7 June 2018 Accepted
  Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering Science > Physics
  Department:	Faculty of Science > Physics Faculty of Engineering > Electronic and Electrical Engineering
  Depositing user:	Pure Administrator
  Date deposited:	11 Jun 2018 11:20
  Last modified:	20 Dec 2024 02:31
  URI:	https://strathprints.strath.ac.uk/id/eprint/64393