High accuracy transfer printing of single-mode membrane silicon photonic devices

McPhillimy, John and Guilhabert, Benoit and Klitis, Charalambos and Dawson, Martin D. and Sorel, Marc and Strain, Michael J. (2018) High accuracy transfer printing of single-mode membrane silicon photonic devices. Optics Express, 26 (13). pp. 16679-16688. ISSN 1094-4087 (https://doi.org/10.1364/OE.26.016679)

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A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100±70nm. Silicon (Si) µ-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to an underlying Si bus waveguide.


McPhillimy, John ORCID logoORCID: https://orcid.org/0000-0003-3415-3796, Guilhabert, Benoit ORCID logoORCID: https://orcid.org/0000-0002-3986-8566, Klitis, Charalambos, Dawson, Martin D. ORCID logoORCID: https://orcid.org/0000-0002-6639-2989, Sorel, Marc and Strain, Michael J. ORCID logoORCID: https://orcid.org/0000-0002-9752-3144;