High accuracy transfer printing of single-mode membrane silicon photonic devices

McPhillimy, John and Guilhabert, Benoit and Klitis, Charalambos and Dawson, Martin D. and Sorel, Marc and Strain, Michael J. (2018) High accuracy transfer printing of single-mode membrane silicon photonic devices. Optics Express, 26 (13). pp. 16679-16688. ISSN 1094-4087

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    Abstract

    A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100±70nm. Silicon (Si) µ-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to an underlying Si bus waveguide.

    ORCID iDs

    McPhillimy, John ORCID logoORCID: https://orcid.org/0000-0003-3415-3796, Guilhabert, Benoit ORCID logoORCID: https://orcid.org/0000-0002-3986-8566, Klitis, Charalambos, Dawson, Martin D. ORCID logoORCID: https://orcid.org/0000-0002-6639-2989, Sorel, Marc and Strain, Michael J. ORCID logoORCID: https://orcid.org/0000-0002-9752-3144;
    • Item type:Article
      ID code:64277
      Dates:
      Date
      Event
      25 June 2018
      Published
      14 June 2018
      Published Online
      30 May 2018
      Accepted
      Keywords:transfer printing (TP) method, micro-assembly, integrated photonic devices , ultra thin membranes, Optics. Light, Atomic and Molecular Physics, and Optics
      Subjects:Science > Physics > Optics. Light
      Department:Faculty of Science > Physics
      Faculty of Science > Physics > Institute of Photonics
      Depositing user: Pure Administrator
      Date deposited:06 Jun 2018 14:06
      Last modified:23 Sep 2021 06:45
      Related URLs:
      URI:https://strathprints.strath.ac.uk/id/eprint/64277
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