High accuracy transfer printing of single-mode membrane silicon photonic devices

McPhillimy, John and Guilhabert, Benoit and Klitis, Charalambos and Dawson, Martin D. and Sorel, Marc and Strain, Michael J. (2018) High accuracy transfer printing of single-mode membrane silicon photonic devices. Optics Express, 26 (13). pp. 16679-16688. ISSN 1094-4087 (https://doi.org/10.1364/OE.26.016679)

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Abstract

A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100±70nm. Silicon (Si) µ-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to an underlying Si bus waveguide.

ORCID iDs

McPhillimy, John ORCID logoORCID: https://orcid.org/0000-0003-3415-3796, Guilhabert, Benoit ORCID logoORCID: https://orcid.org/0000-0002-3986-8566, Klitis, Charalambos, Dawson, Martin D. ORCID logoORCID: https://orcid.org/0000-0002-6639-2989, Sorel, Marc and Strain, Michael J. ORCID logoORCID: https://orcid.org/0000-0002-9752-3144;
  • Item type:Article
    ID code:64277
    Dates:
    Date
    Event
    25 June 2018
    Published
    14 June 2018
    Published Online
    30 May 2018
    Accepted
    Keywords:transfer printing (TP) method, micro-assembly, integrated photonic devices , ultra thin membranes, Optics. Light, Atomic and Molecular Physics, and Optics
    Subjects:Science > Physics > Optics. Light
    Department:Faculty of Science > Physics
    Faculty of Science > Physics > Institute of Photonics
    Depositing user: Pure Administrator
    Date deposited:06 Jun 2018 14:06
    Last modified:14 Mar 2023 04:16
    Related URLs:
    URI:https://strathprints.strath.ac.uk/id/eprint/64277
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