High accuracy transfer printing of single-mode membrane silicon photonic devices
McPhillimy, John and Guilhabert, Benoit and Klitis, Charalambos and Dawson, Martin D. and Sorel, Marc and Strain, Michael J. (2018) High accuracy transfer printing of single-mode membrane silicon photonic devices. Optics Express, 26 (13). pp. 16679-16688. ISSN 1094-4087
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Abstract
A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100±70nm. Silicon (Si) µ-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to an underlying Si bus waveguide.
Creators(s): |
McPhillimy, John ![]() ![]() ![]() ![]() | Item type: | Article |
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ID code: | 64277 |
Keywords: | transfer printing (TP) method, micro-assembly, integrated photonic devices , ultra thin membranes, Optics. Light, Atomic and Molecular Physics, and Optics |
Subjects: | Science > Physics > Optics. Light |
Department: | Faculty of Science > Physics Faculty of Science > Physics > Institute of Photonics |
Depositing user: | Pure Administrator |
Date deposited: | 06 Jun 2018 14:06 |
Last modified: | 21 Jan 2021 10:06 |
Related URLs: | |
URI: | https://strathprints.strath.ac.uk/id/eprint/64277 |
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