High accuracy transfer printing of single-mode membrane silicon photonic devices

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McPhillimy, John and Guilhabert, Benoit and Klitis, Charalambos and Dawson, Martin D. and Sorel, Marc and Strain, Michael J. (2018) High accuracy transfer printing of single-mode membrane silicon photonic devices. Optics Express, 26 (13). pp. 16679-16688. ISSN 1094-4087 (https://doi.org/10.1364/OE.26.016679)

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Abstract

A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100±70nm. Silicon (Si) µ-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to an underlying Si bus waveguide.

ORCID iDs

McPhillimy, John ORCID logoORCID: https://orcid.org/0000-0003-3415-3796, Guilhabert, Benoit ORCID logoORCID: https://orcid.org/0000-0002-3986-8566, Klitis, Charalambos, Dawson, Martin D. ORCID logoORCID: https://orcid.org/0000-0002-6639-2989, Sorel, Marc and Strain, Michael J. ORCID logoORCID: https://orcid.org/0000-0002-9752-3144;
CORE (COnnecting REpositories)