A MEMS microphone inspired by Ormia for spatial sound detection

Zhang, Yansheng and Bauer, Ralf and Whitmer, William M. and Jackson, Joseph C. and Windmill, James F.C. and Uttamchandani, Deepak (2018) A MEMS microphone inspired by Ormia for spatial sound detection. In: The 31st IEEE International Conference on Micro Electro Mechanical Systems, 2018-01-21 - 2018-01-25, Belfast Waterfront. (https://doi.org/10.1109/MEMSYS.2018.8346532)

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Abstract

This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two individual bi-directional microphones. Combining this architecture with the fly Ormia ochracea’s tympana mechanism, this microphone is also the first biomimetic MEMS microphone with piezoelectric sensing, designed for 2D sound localization.

ORCID iDs

Bauer, Ralf ORCID: https://orcid.org/0000-0001-7927-9435

Windmill, James F.C. ORCID: https://orcid.org/0000-0003-4878-349X

Uttamchandani, Deepak ORCID: https://orcid.org/0000-0002-2362-4874

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• Item metadata

  Item type:	Conference or Workshop Item(Paper)
  ID code:	62474
  Dates:	Date Event 26 April 2018 Published 21 November 2017 Accepted
  Notes:	© 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
  Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering
  Department:	Faculty of Engineering > Electronic and Electrical Engineering Technology and Innovation Centre > Sensors and Asset Management
  Depositing user:	Pure Administrator
  Date deposited:	29 Nov 2017 15:39
  Last modified:	21 Dec 2024 01:33
  URI:	https://strathprints.strath.ac.uk/id/eprint/62474