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MEMS micromirror based light sheet generator for biomedical imaging

Bauer, Ralf and Uttamchandani, Deepak (2017) MEMS micromirror based light sheet generator for biomedical imaging. In: 2017 International Conference on Optical MEMS and Nanophotonics, 2017-08-13 - 2017-08-17, Courtyard Marriott. (In Press)

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Two MEMS micromirrors with resonant or static actuation are used as a MEMS enabled light sheet generator, with light sheet dimensions of 3.5μm by 550μm and offset positioning of 150μm in the focal plane.