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MEMS micromirror based light sheet generator for biomedical imaging

Bauer, Ralf and Uttamchandani, Deepak (2017) MEMS micromirror based light sheet generator for biomedical imaging. In: 2017 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, Piscataway, NJ. ISBN 9781538607374

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Abstract

Two MEMS micromirrors with resonant or static actuation are used as a MEMS enabled light sheet generator, with light sheet dimensions of 3.5μm by 550μm and offset positioning of 150μm in the focal plane.