MEMS micromirror based light sheet generator for biomedical imaging

Bauer, Ralf and Uttamchandani, Deepak; (2017) MEMS micromirror based light sheet generator for biomedical imaging. In: 2017 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, USA. ISBN 9781538607374 (https://doi.org/10.1109/OMN.2017.8051499)

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Abstract

Two MEMS micromirrors with resonant or static actuation are used as a MEMS enabled light sheet generator, with light sheet dimensions of 3.5μm by 550μm and offset positioning of 150μm in the focal plane.

ORCID iDs

Bauer, Ralf ORCID logoORCID: https://orcid.org/0000-0001-7927-9435 and Uttamchandani, Deepak ORCID logoORCID: https://orcid.org/0000-0002-2362-4874;