Improving the yield and lifetime of microfabricated sensors for harsh environments

Blair, Ewen and Corrigan, D.K. and Levene, H.J. and Schmueser, I. and Terry, J. G. and Smith, S. and Mount, A. R. and Walton, A. J. (2017) Improving the yield and lifetime of microfabricated sensors for harsh environments. IEEE Transactions on Semiconductor Manufacturing, 30 (3). pp. 192-200. ISSN 0894-6507 (https://doi.org/10.1109/TSM.2017.2715377)

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Abstract

This paper details improvements in the design and fabrication of electrodes intended to function in the high temperature, corrosive environment of a molten salt. Previously reported devices have displayed low yield and lifetimes and this paper presents two strategies to improve these aspects of their performance. The first one involves reducing the critical area, which increased both the electrode yield and lifetimes. The second element utilised test structures, targeted at identifying failure mechanisms, which helped facilitate the materials/design modifications required to make the devices more robust.

ORCID iDs

Blair, Ewen ORCID logoORCID: https://orcid.org/0000-0002-1887-8001, Corrigan, D.K. ORCID logoORCID: https://orcid.org/0000-0002-4647-7483, Levene, H.J., Schmueser, I., Terry, J. G., Smith, S., Mount, A. R. and Walton, A. J.;
  • Item type:Article
    ID code:60838
    Dates:
    Date
    Event
    31 August 2017
    Published
    14 June 2017
    Published Online
    1 June 2017
    Accepted
    Notes:© 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
    Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
    Department:Faculty of Engineering > Biomedical Engineering
    Depositing user: Pure Administrator
    Date deposited:06 Jun 2017 00:55
    Last modified:11 Nov 2024 11:42
    Related URLs:
    URI:https://strathprints.strath.ac.uk/id/eprint/60838
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