Housing influence on multi-band directional MEMS microphones inspired by Ormia ochracea

Bauer, R. and Zhang, Y. and Jackson, J. C. and Whitmer, W. M. and Brimijoin, W. O. and Akeroyd, M. and Uttamchandani, D. and Windmill, J. F. C.; (2017) Housing influence on multi-band directional MEMS microphones inspired by Ormia ochracea. In: IEEE Sensors, 2016. IEEE, USA. ISBN 978-1-4799-8288-2 (https://doi.org/10.1109/ICSENS.2016.7808765)

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Abstract

A new bio-inspired multi-band directional MEMS microphone based on the hearing properties of the fly Ormia ochracea is presented, together with the behavioral influence of 3D-printed housings. The multi-user foundry fabricated microphone operates on four frequency bands, all below 10 kHz and acts as a pressure gradient directional microphone with figure of eight polar pattern, or as an omni-directional microphone depending on the housing. The influence of an open or closed backside housing on the frequency response and directionality is shown, leading to the loss of directionality with no acoustic access to the backside of the fly-ear inspired microphone membrane.