Nanofabrication of electrode arrays by electron-beam and nanoimprint lithographies

Sandison, Mairi E. and Cooper, Jonathan M. (2006) Nanofabrication of electrode arrays by electron-beam and nanoimprint lithographies. Lab on a Chip, 6 (8). pp. 1020-1025. ISSN 1473-0197

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Official URL: https://doi.org/10.1039/b516598a

Abstract

The fabrication of ordered nanoelectrode arrays using both electron-beam lithography and nanoimprint lithography is described. Arrays of nanoelectrodes with varying individual electrode diameters were produced and characterised electrochemically. Whilst both methods are highly reproducibile, nanoimprint lithography has the potential to produce devices rapidly and at low-cost. To our knowledge, this is the first report where nanoimprint lithography is employed for the production of nanoelectrode arrays for electroanalytical sensors.

Creators(s):	Sandison, Mairi E. ORCID: https://orcid.org/0000-0003-1021-1461 and Cooper, Jonathan M.;
Item type:	Article
ID code:	54420
Keywords:	electrode arrays, nanoimprint lithography, electroanalytical sensors, Bioengineering, Biomedical Engineering, Biochemistry, Bioengineering, Chemistry(all)
Subjects:	Technology > Engineering (General). Civil engineering (General) > Bioengineering
Department:	Faculty of Science > Strathclyde Institute of Pharmacy and Biomedical Sciences Faculty of Engineering > Biomedical Engineering
Depositing user:	Pure Administrator
Date deposited:	01 Oct 2015 12:54
Last modified:	20 Jan 2021 23:28
URI:	https://strathprints.strath.ac.uk/id/eprint/54420
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