Nanofabrication of electrode arrays by electron-beam and nanoimprint lithographies

Sandison, Mairi E. and Cooper, Jonathan M. (2006) Nanofabrication of electrode arrays by electron-beam and nanoimprint lithographies. Lab on a Chip, 6 (8). pp. 1020-1025. ISSN 1473-0197

Abstract

The fabrication of ordered nanoelectrode arrays using both electron-beam lithography and nanoimprint lithography is described. Arrays of nanoelectrodes with varying individual electrode diameters were produced and characterised electrochemically. Whilst both methods are highly reproducibile, nanoimprint lithography has the potential to produce devices rapidly and at low-cost. To our knowledge, this is the first report where nanoimprint lithography is employed for the production of nanoelectrode arrays for electroanalytical sensors.

ORCID iDs

Sandison, Mairi E. ORCID: https://orcid.org/0000-0003-1021-1461

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  Item type:	Article
  ID code:	54420
  Dates:	Date Event August 2006 Published 21 June 2006 Published Online
  Keywords:	electrode arrays, nanoimprint lithography, electroanalytical sensors, Bioengineering, Biomedical Engineering, Biochemistry, Bioengineering, Chemistry(all)
  Subjects:	Technology > Engineering (General). Civil engineering (General) > Bioengineering
  Department:	Faculty of Science > Strathclyde Institute of Pharmacy and Biomedical Sciences Faculty of Engineering > Biomedical Engineering
  Depositing user:	Pure Administrator
  Date deposited:	01 Oct 2015 12:54
  Last modified:	13 Aug 2021 02:07
  URI:	https://strathprints.strath.ac.uk/id/eprint/54420