Polymer microlens arrays applicable to AllnGaN ultraviolet micro-light-emitting diodes

Jeon, C.W. and Gu, E. and Liu, C. and Girkin, J.M. and Dawson, M.D. (2005) Polymer microlens arrays applicable to AllnGaN ultraviolet micro-light-emitting diodes. IEEE Photonics Technology Letters, 17 (9). pp. 1887-1889. ISSN 1041-1135 (http://dx.doi.org/10.1109/LPT.2005.851932)

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Abstract

We report on the fabrication of high-optical-quality microlens arrays based on ultraviolet (UV)-curable polymer adhesive. The lenses are suitable, amongst other applications, for high-transmission and projection of the output of UV micropixellated light-emitting diodes. The microlenses were fabricated using a resist-reflow technique with reactive ion etching. An O/sub 2/--CF/sub 4/ etch-gas chemistry, where atomic fluorine eliminates the carbon-related polymer residue at the etch front effectively, resulted in etch rates of 1.4 /spl mu/m per minute for the polymer. Spherical microlenses of root mean square surface roughness 3 nm were obtained.

ORCID iDs

Jeon, C.W., Gu, E. ORCID logoORCID: https://orcid.org/0000-0002-7607-9902, Liu, C., Girkin, J.M. and Dawson, M.D. ORCID logoORCID: https://orcid.org/0000-0002-6639-2989;
  • Item type:Article
    ID code:5268
    Dates:
    Date
    Event
    2005
    Published
    Keywords:semiconductors, adhesives, aluminium compounds, gallium compounds, indium compounds, light emitting diodes microlenses, optical arrays, optical polymers, photonics, Optics. Light, Electronic, Optical and Magnetic Materials, Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering
    Subjects:Science > Physics > Optics. Light
    Department:Faculty of Science > Physics > Institute of Photonics
    Depositing user: Strathprints Administrator
    Date deposited:31 Jan 2008
    Last modified:23 Nov 2023 20:00
    URI:https://strathprints.strath.ac.uk/id/eprint/5268
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