Intracavity control of solid-state lasers using MEMS micromirrors

Paterson, Alan and Bauer, Ralf and Clark, Caspar and Uttamchandani, Deepak and Lubeigt, Walter; (2014) Intracavity control of solid-state lasers using MEMS micromirrors. In: International Conference on Optical MEMS and Nanophotonics. IEEE, GBR, pp. 219-220. ISBN 9780992841423 (

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Active control of key laser output beam parameters, such as optical power and transverse intensity profile, of a continuous-wave (CW) Nd:YAG laser is reported. This was achieved by accurately controlling the surface profile of an intracavity MEMS micromirror through active control of its substrate temperature. An output power variation (>20%) and a significant modification of the transverse mode profile could be observed for a temperature variation of 35 °C.


Paterson, Alan ORCID logoORCID:, Bauer, Ralf ORCID logoORCID:, Clark, Caspar, Uttamchandani, Deepak ORCID logoORCID: and Lubeigt, Walter;