A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators

Lì, Lì and Bauer, Ralf and Brown, Gordon D.A. and Uttamchandani, Deepak G.; (2012) A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators. In: International Conference on Optical MEMS and Nanophotonics (OMN), 2012. IEEE, Piscataway, NJ, United States, pp. 73-74. ISBN 9781457715112

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Abstract

A hybrid two-axis scanning micromirror combining electrostatic and electrothermal actuators was fabricated using SOIMUMPs. Experimental evaluation shows the device is capable of scan in two orthogonal directions and produces a rectangular raster-scan pattern.

ORCID iDs

Lì, Lì, Bauer, Ralf ORCID logoORCID: https://orcid.org/0000-0001-7927-9435, Brown, Gordon D.A. and Uttamchandani, Deepak G. ORCID logoORCID: https://orcid.org/0000-0002-2362-4874;