A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators

Lì, Lì and Bauer, Ralf and Brown, Gordon D.A. and Uttamchandani, Deepak G.; (2012) A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators. In: International Conference on Optical MEMS and Nanophotonics (OMN), 2012. IEEE, Piscataway, NJ, United States, pp. 73-74. ISBN 9781457715112 (https://doi.org/10.1109/OMEMS.2012.6318808)

Abstract

A hybrid two-axis scanning micromirror combining electrostatic and electrothermal actuators was fabricated using SOIMUMPs. Experimental evaluation shows the device is capable of scan in two orthogonal directions and produces a rectangular raster-scan pattern.

ORCID iDs

Bauer, Ralf ORCID: https://orcid.org/0000-0001-7927-9435

Uttamchandani, Deepak G. ORCID: https://orcid.org/0000-0002-2362-4874

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• Item metadata

  Item type:	Book Section
  ID code:	48017
  Dates:	Date Event 22 November 2012 Published
  Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering Science > Physics > Optics. Light
  Department:	Faculty of Engineering > Electronic and Electrical Engineering University of Strathclyde > University of Strathclyde
  Depositing user:	Pure Administrator
  Date deposited:	12 May 2014 14:20
  Last modified:	11 Nov 2024 14:55
  Related URLs:	Scopus publication
  URI:	https://strathprints.strath.ac.uk/id/eprint/48017