Thermoelectrically controlled varifocal micromirror for near aberration free imaging

Lì, Lì and Li, Ran and Lubeigt, Walter and Uttamchandani, Deepak G. (2013) Thermoelectrically controlled varifocal micromirror for near aberration free imaging. In: 2013 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, Piscataway, NJ, United States, pp. 17-18. ISBN 9781479915125

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Abstract

A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.