Thermoelectrically controlled varifocal micromirror for near aberration free imaging
Lì, Lì and Li, Ran and Lubeigt, Walter and Uttamchandani, Deepak G.; (2013) Thermoelectrically controlled varifocal micromirror for near aberration free imaging. In: 2013 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, Piscataway, NJ, United States, pp. 17-18. ISBN 9781479915125 (https://doi.org/10.1109/OMN.2013.6659037)
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A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.
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Item type: Book Section ID code: 47941 Dates: DateEvent1 December 2013PublishedSubjects: Technology > Electrical engineering. Electronics Nuclear engineering Department: Faculty of Engineering > Electronic and Electrical Engineering
University of Strathclyde > University of Strathclyde
Technology and Innovation Centre > Sensors and Asset ManagementDepositing user: Pure Administrator Date deposited: 08 May 2014 15:03 Last modified: 08 Apr 2024 13:11 Related URLs: URI: https://strathprints.strath.ac.uk/id/eprint/47941