Thermoelectrically controlled varifocal micromirror for near aberration free imaging

Lì, Lì and Li, Ran and Lubeigt, Walter and Uttamchandani, Deepak G.; (2013) Thermoelectrically controlled varifocal micromirror for near aberration free imaging. In: 2013 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, Piscataway, NJ, United States, pp. 17-18. ISBN 9781479915125

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Abstract

A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.

ORCID iDs

Lì, Lì, Li, Ran ORCID logoORCID: https://orcid.org/0000-0003-1518-0617, Lubeigt, Walter and Uttamchandani, Deepak G. ORCID logoORCID: https://orcid.org/0000-0002-2362-4874;