Polysilicon interdigitated electrodes as impedimetric sensors

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De La Rica, Roberto and Fernandez-Sanchez, Cesar and Baldi, Antonio (2006) Polysilicon interdigitated electrodes as impedimetric sensors. Electrochemistry Communications, 8 (8). pp. 1239-1244. ISSN 1388-2481 (http://dx.doi.org/10.1016/j.elecom.2006.05.028)

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Abstract

The suitability of polysilicon as a material for the fabrication of interdigitated electrodes and their application to the development of sensors is studied in this work. The main interest in using this material lies in the possibility of obtaining integrated sensors with commercial CMOS technologies and simple post-processing steps. Electrodes with 3 mu m finger width and 3, 10, and 20 mu m spacing were fabricated and characterised. Conductivity measurements in the range from 4 to 50 mu S/cm yielded a linear response with cell constants of 0.0416 cm(-1), 0.155 cm(-1) and 0.33 cm(-1), respectively. Permittivity measurements in the range from epsilon(r) = 80.1 to epsilon(r) = 1.89 yielded a linear response and similar cell constants. The possibility to functionalise both the electrode fingers and the space in between them using a single silanisation process is an interesting advantage of polysilicon electrodes. An urease-based biosensor was obtained with this procedure and characterisation results are reported.

  • Item type:Article
    ID code:45755
    Dates:
    Date
    Event
    August 2006
    Published
    Subjects:Science > Physics
    Department:Faculty of Science > Physics
    Depositing user: Pure Administrator
    Date deposited:08 Nov 2013 09:38
    Last modified:14 Jun 2025 00:11
    URI:https://strathprints.strath.ac.uk/id/eprint/45755
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