Nanopatterned crossbar structures for molecular electronics

He, D. and Saw, B. T. and Lau, K. H. A. and Wilhelmi, O. and Moser, H. O. and O'Shea, S.; Zhou, W. and Ngoi, B. and Lim, G.C., eds. (2005) Nanopatterned crossbar structures for molecular electronics. In: International Journal of Nanoscience. International Journal of Nanoscience Series . World Scientific Publishing Company, SGP, pp. 461-465. (

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Nano-patterned crossbar structures were fabricated as test structures for the development of nanoelectronic devices based on functional molecules. The crossbar structures serve as a platform for testing electronic properties of molecules and their interface to metal electrodes. The fabrication of the crossbar structures involved electron-beam lithography of sub-100-nm features aligned to electrodes pre-patterned by LTV lithography and the deposition of and pattern transfer into an intermediate layer. The molecules to be tested were self-assembled as a monolayer on the nanopatterned area. The top electrode structures were subsequently deposited on top of the intermediate layer. The crossbar architecture allows measuring the current-voltage characteristics across the molecules for each crossing point individually.