Nanopatterned crossbar structures for molecular electronics

He, D. and Saw, B. T. and Lau, K. H. A. and Wilhelmi, O. and Moser, H. O. and O'Shea, S. (2005) Nanopatterned crossbar structures for molecular electronics. In: International Journal of Nanoscience. International Journal of Nanoscience Series . World Scientific Publishing Company, Singapore, pp. 461-465.

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Nano-patterned crossbar structures were fabricated as test structures for the development of nanoelectronic devices based on functional molecules. The crossbar structures serve as a platform for testing electronic properties of molecules and their interface to metal electrodes. The fabrication of the crossbar structures involved electron-beam lithography of sub-100-nm features aligned to electrodes pre-patterned by LTV lithography and the deposition of and pattern transfer into an intermediate layer. The molecules to be tested were self-assembled as a monolayer on the nanopatterned area. The top electrode structures were subsequently deposited on top of the intermediate layer. The crossbar architecture allows measuring the current-voltage characteristics across the molecules for each crossing point individually.