Comparison of diamond drilling and laser drilling techniques in glass drilling for fabrication of MEMS

Sun, Jining and Chang, Wenlong and Luo, Xichun (2009) Comparison of diamond drilling and laser drilling techniques in glass drilling for fabrication of MEMS. In: 9th euspen International Conference, 2009-06-02 - 2009-06-05.

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ORCID iDs

Sun, Jining, Chang, Wenlong and Luo, Xichun ORCID logoORCID: https://orcid.org/0000-0002-5024-7058;