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Fabrication of periodic metal nanodots array

Sun, Jining and Shu, Will and Luo, Xichun and Ritchie, James M. and Chang, Wenlong (2010) Fabrication of periodic metal nanodots array. In: ASPE 2010 Annual Meeting, 2010-10-31 - 2010-11-04.

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In this paper, we carried out initial proof of concept experiment with an aim to develop a fast and low cost fabrication method based on NIL and μCP for periodic gold nanodots arrays on a polymer substrate.