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Driving innovations in manufacturing: Open Access research from DMEM

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Centred on the vision of 'Delivering Total Engineering', DMEM is a centre for excellence in the processes, systems and technologies needed to support and enable engineering from concept to remanufacture. From user-centred design to sustainable design, from manufacturing operations to remanufacturing, from advanced materials research to systems engineering.

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Modeling and characterization of a vernier latching MEMS variable optical attenuator

Unamuno, Anartz and Blue, Robert and Uttamchandani, Deepak (2013) Modeling and characterization of a vernier latching MEMS variable optical attenuator. Journal of Microelectromechanical Systems, 22 (5). pp. 1229-1241. ISSN 1057-7157

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Abstract

We report on the modeling and testing of a Vernier latched MEMS variable optical attenuator (VOA) which uses chevron electrothermal microactuators to control fiber-to-fiber optical power coupling. The use of microlatches has the advantage of holding the mechanical position of the fiber, and therefore the level of attenuation, with no electrical energy supplied except only to change the attenuation. Results of analytical electro-thermo-mechanical models of the device are obtained and compared with experimental test results, showing a good agreement. A step resolution of 0.5 μm for this multi-state latched device is achieved using a Vernier latch approach. This incremental step size is smaller than previously reported latched microactuators. The VOA demonstrated an attenuation range of over 47 dB and an insertion loss of 1 dB. The wavelength dependent loss across the optical communications C-band is 1.4 dB at 40 dB attenuation and the 10-90% transition time of the unlatched VOA is measured to be 1.7 ms.