Modeling and characterization of a vernier latching MEMS variable optical attenuator

Unamuno, Anartz and Blue, Robert and Uttamchandani, Deepak (2013) Modeling and characterization of a vernier latching MEMS variable optical attenuator. Journal of Microelectromechanical Systems, 22 (5). pp. 1229-1241. ISSN 1057-7157

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    Abstract

    We report on the modeling and testing of a Vernier latched MEMS variable optical attenuator (VOA) which uses chevron electrothermal microactuators to control fiber-to-fiber optical power coupling. The use of microlatches has the advantage of holding the mechanical position of the fiber, and therefore the level of attenuation, with no electrical energy supplied except only to change the attenuation. Results of analytical electro-thermo-mechanical models of the device are obtained and compared with experimental test results, showing a good agreement. A step resolution of 0.5 μm for this multi-state latched device is achieved using a Vernier latch approach. This incremental step size is smaller than previously reported latched microactuators. The VOA demonstrated an attenuation range of over 47 dB and an insertion loss of 1 dB. The wavelength dependent loss across the optical communications C-band is 1.4 dB at 40 dB attenuation and the 10-90% transition time of the unlatched VOA is measured to be 1.7 ms.

    ORCID iDs

    Unamuno, Anartz, Blue, Robert ORCID logoORCID: https://orcid.org/0000-0002-8598-5210 and Uttamchandani, Deepak ORCID logoORCID: https://orcid.org/0000-0002-2362-4874;
    • Item type:Article
      ID code:44730
      Dates:
      Date
      Event
      1 October 2013
      Published
      17 June 2013
      Published Online
      Notes:© 2013 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
      Keywords:chevron microactuators, variable optical attenuator, fiber-to-fiber coupling, vernier-latch, electro-thermal actuators, MEMS, Electrical engineering. Electronics Nuclear engineering, Electrical and Electronic Engineering
      Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
      Department:Faculty of Engineering > Electronic and Electrical Engineering
      Depositing user: Pure Administrator
      Date deposited:06 Sep 2013 08:50
      Last modified:12 Sep 2021 01:53
      Related URLs:
      URI:https://strathprints.strath.ac.uk/id/eprint/44730
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