Modeling and characterization of a vernier latching MEMS variable optical attenuator
Unamuno, Anartz and Blue, Robert and Uttamchandani, Deepak (2013) Modeling and characterization of a vernier latching MEMS variable optical attenuator. Journal of Microelectromechanical Systems, 22 (5). pp. 1229-1241. ISSN 1057-7157 (https://doi.org/10.1109/JMEMS.2013.2262593)
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Abstract
We report on the modeling and testing of a Vernier latched MEMS variable optical attenuator (VOA) which uses chevron electrothermal microactuators to control fiber-to-fiber optical power coupling. The use of microlatches has the advantage of holding the mechanical position of the fiber, and therefore the level of attenuation, with no electrical energy supplied except only to change the attenuation. Results of analytical electro-thermo-mechanical models of the device are obtained and compared with experimental test results, showing a good agreement. A step resolution of 0.5 μm for this multi-state latched device is achieved using a Vernier latch approach. This incremental step size is smaller than previously reported latched microactuators. The VOA demonstrated an attenuation range of over 47 dB and an insertion loss of 1 dB. The wavelength dependent loss across the optical communications C-band is 1.4 dB at 40 dB attenuation and the 10-90% transition time of the unlatched VOA is measured to be 1.7 ms.
ORCID iDs
Unamuno, Anartz, Blue, Robert ORCID: https://orcid.org/0000-0002-8598-5210 and Uttamchandani, Deepak ORCID: https://orcid.org/0000-0002-2362-4874;-
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Item type: Article ID code: 44730 Dates: DateEvent1 October 2013Published17 June 2013Published OnlineNotes: © 2013 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. Subjects: Technology > Electrical engineering. Electronics Nuclear engineering Department: Faculty of Engineering > Electronic and Electrical Engineering Depositing user: Pure Administrator Date deposited: 06 Sep 2013 08:50 Last modified: 03 Dec 2024 01:13 Related URLs: URI: https://strathprints.strath.ac.uk/id/eprint/44730