Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors

Bauer, R. and Brown, G. and Uttamchandani, D.; (2011) Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors. In: OMN2011. IEEE, TUR, pp. 187-188. ISBN 9781457703362 (https://doi.org/10.1109/OMEMS.2011.6031056)

Abstract

Dynamic behavior hysteresis of framed and frameless comb-drive actuated 2D MEMS scanning micromirrors is experimentally compared, with a framed micromirror showing reduction or even elimination of the hysteretic frequency response along one of its principal motion axes.

ORCID iDs

Bauer, R. ORCID: https://orcid.org/0000-0001-7927-9435

Uttamchandani, D. ORCID: https://orcid.org/0000-0002-2362-4874

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• Item metadata

  Item type:	Book Section
  ID code:	41604
  Dates:	Date Event 2011 Published
  Keywords:	frame, hysteresis, mems micromirror, resonant 2D scanning, framed, frameless, electrostatic X/Y scanning , Electrical Engineering. Electronics Nuclear Engineering
  Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering
  Department:	Faculty of Engineering > Electronic and Electrical Engineering
  Depositing user:	Pure Administrator
  Date deposited:	19 Oct 2012 15:59
  Last modified:	21 May 2023 03:07
  URI:	https://strathprints.strath.ac.uk/id/eprint/41604