Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors
Bauer, R. and Brown, G. and Uttamchandani, D.; (2011) Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors. In: OMN2011. IEEE, TUR, pp. 187-188. ISBN 9781457703362
Full text not available in this repository.Request a copy from the Strathclyde authorOfficial URL: https://doi.org/10.1109/OMEMS.2011.6031056
Abstract
Dynamic behavior hysteresis of framed and frameless comb-drive actuated 2D MEMS scanning micromirrors is experimentally compared, with a framed micromirror showing reduction or even elimination of the hysteretic frequency response along one of its principal motion axes.
Creators(s): |
Bauer, R. ![]() ![]() | Item type: | Book Section |
---|---|
ID code: | 41604 |
Keywords: | frame, hysteresis, mems micromirror, resonant 2D scanning, framed, frameless, electrostatic X/Y scanning , Electrical engineering. Electronics Nuclear engineering |
Subjects: | Technology > Electrical engineering. Electronics Nuclear engineering |
Department: | Faculty of Engineering > Electronic and Electrical Engineering |
Depositing user: | Pure Administrator |
Date deposited: | 19 Oct 2012 15:59 |
Last modified: | 20 Jan 2021 15:28 |
URI: | https://strathprints.strath.ac.uk/id/eprint/41604 |
Export data: |
CORE (COnnecting REpositories)