Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors

Bauer, R. and Brown, G. and Uttamchandani, D.; (2011) Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors. In: OMN2011. IEEE, TUR, pp. 187-188. ISBN 9781457703362

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Abstract

Dynamic behavior hysteresis of framed and frameless comb-drive actuated 2D MEMS scanning micromirrors is experimentally compared, with a framed micromirror showing reduction or even elimination of the hysteretic frequency response along one of its principal motion axes.

Creators(s): Bauer, R. ORCID logoORCID: https://orcid.org/0000-0001-7927-9435, Brown, G. and Uttamchandani, D. ORCID logoORCID: https://orcid.org/0000-0002-2362-4874;
Item type:Book Section
ID code:41604
Keywords:frame, hysteresis, mems micromirror, resonant 2D scanning, framed, frameless, electrostatic X/Y scanning , Electrical engineering. Electronics Nuclear engineering
Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
Department:Faculty of Engineering > Electronic and Electrical Engineering
Depositing user: Pure Administrator
Date deposited:19 Oct 2012 15:59
Last modified:02 Aug 2020 02:34
URI:https://strathprints.strath.ac.uk/id/eprint/41604
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