Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors

Bauer, R. and Brown, G. and Uttamchandani, D. (2011) Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors. In: OMN2011. IEEE, New York, pp. 187-188. ISBN 9781457703362

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Abstract

Dynamic behavior hysteresis of framed and frameless comb-drive actuated 2D MEMS scanning micromirrors is experimentally compared, with a framed micromirror showing reduction or even elimination of the hysteretic frequency response along one of its principal motion axes.