Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors

Bauer, R. and Brown, G. and Uttamchandani, D. (2011) Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors. In: OMN2011. IEEE, New York, pp. 187-188. ISBN 9781457703362

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Abstract

Dynamic behavior hysteresis of framed and frameless comb-drive actuated 2D MEMS scanning micromirrors is experimentally compared, with a framed micromirror showing reduction or even elimination of the hysteretic frequency response along one of its principal motion axes.

Author(s):Bauer, R., Brown, G. and Uttamchandani, D.
Item type:Book Section
ID code:41604
Keywords:frame, hysteresis, mems micromirror, resonant 2D scanning, framed, frameless, electrostatic X/Y scanning , Electrical engineering. Electronics Nuclear engineering
Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
Department:Faculty of Engineering > Electronic and Electrical Engineering
Depositing user: Pure Administrator
Date deposited:19 Oct 2012 15:59
Last modified:30 Jan 2019 10:22
URI:https://strathprints.strath.ac.uk/id/eprint/41604
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