Optical MEMS using commercial foundries

Uttamchandani, D.G.; Pal, Bishnu P., ed. (2005) Optical MEMS using commercial foundries. In: Guided wave optical components and devices. Academic Press, pp. 353-369. ISBN 9780120884810

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Abstract

This chapter explores optical MEMS using commercial foundries

ORCID iDs

Uttamchandani, D.G. ORCID logoORCID: https://orcid.org/0000-0002-2362-4874; Pal, Bishnu P.