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Optical MEMS using commercial foundries

Uttamchandani, D.G. (2005) Optical MEMS using commercial foundries. In: Guided wave optical components and devices. Academic Press, pp. 353-369. ISBN 9780120884810

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Abstract

This chapter explores optical MEMS using commercial foundries

Item type:	Book Section
ID code:	36865
Keywords:	optical mems, commercial foundries, fabrication, experimental, design, Electrical engineering. Electronics Nuclear engineering
Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering
Department:	Faculty of Engineering > Electronic and Electrical Engineering
Depositing user:	Pure Administrator
Date deposited:	19 Jan 2012 15:01
Last modified:	19 Sep 2017 00:16
URI:	https://strathprints.strath.ac.uk/id/eprint/36865
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