Optical MEMS using commercial foundries
Uttamchandani, D.G.; Pal, Bishnu P., ed. (2005) Optical MEMS using commercial foundries. In: Guided wave optical components and devices. Academic Press, pp. 353-369. ISBN 9780120884810
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This chapter explores optical MEMS using commercial foundries
| Creators(s): |
Uttamchandani, D.G.  ORCID: https://orcid.org/0000-0002-2362-4874;
Pal, Bishnu P.
| Item type: | Book Section |
|---|---|
| ID code: | 36865 |
| Keywords: | optical mems, commercial foundries, fabrication, experimental, design, Electrical engineering. Electronics Nuclear engineering |
| Subjects: | Technology > Electrical engineering. Electronics Nuclear engineering |
| Department: | Faculty of Engineering > Electronic and Electrical Engineering |
| Depositing user: | Pure Administrator |
| Date deposited: | 19 Jan 2012 15:01 |
| Last modified: | 17 Dec 2020 02:56 |
| URI: | https://strathprints.strath.ac.uk/id/eprint/36865 |
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