Optical MEMS using commercial foundries

Uttamchandani, D.G.; Pal, Bishnu P., ed. (2005) Optical MEMS using commercial foundries. In: Guided wave optical components and devices. Academic Press, pp. 353-369. ISBN 9780120884810

Abstract

This chapter explores optical MEMS using commercial foundries

ORCID iDs

Uttamchandani, D.G. ORCID: https://orcid.org/0000-0002-2362-4874

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• Item metadata

  Item type:	Book Section
  ID code:	36865
  Dates:	Date Event 2005 Published
  Keywords:	optical mems, commercial foundries, fabrication, experimental, design, Electrical engineering. Electronics Nuclear engineering
  Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering
  Department:	Faculty of Engineering > Electronic and Electrical Engineering
  Depositing user:	Pure Administrator
  Date deposited:	19 Jan 2012 15:01
  Last modified:	15 Sep 2021 15:29
  URI:	https://strathprints.strath.ac.uk/id/eprint/36865