Picture of DNA strand

Pioneering chemical biology & medicinal chemistry through Open Access research...

Strathprints makes available scholarly Open Access content by researchers in the Department of Pure & Applied Chemistry, based within the Faculty of Science.

Research here spans a wide range of topics from analytical chemistry to materials science, and from biological chemistry to theoretical chemistry. The specific work in chemical biology and medicinal chemistry, as an example, encompasses pioneering techniques in synthesis, bioinformatics, nucleic acid chemistry, amino acid chemistry, heterocyclic chemistry, biophysical chemistry and NMR spectroscopy.

Explore the Open Access research of the Department of Pure & Applied Chemistry. Or explore all of Strathclyde's Open Access research...

Strathprints

Direct comparison of stylus and resonant methods for determining Young's modulus of single and multilayer MEMS cantilevers

Boyd, Euan and Nock, Volker and Weiland, Dominik and Li, Xudong and Uttamchandani, Deepak (2011) Direct comparison of stylus and resonant methods for determining Young's modulus of single and multilayer MEMS cantilevers. Sensors and Actuators A: Physical, 172 (2). pp. 440-446. ISSN 0924-4247

Full text not available in this repository.Request a copy from the Strathclyde author

Abstract

As microelectromechanical systems (MEMS) become more complex and is produced in even greater numbers it becomes increasingly important to have a full understanding of the mechanical properties of the commonly used MEMS materials. One of the most important properties for MEMS is the Young’s modulus. This work describes the direct comparison of two methods often used for measuring the Young’s modulus of thin film materials using micro-cantilever test structures: a load-deflection method and a resonant frequency method. The comparison was carried out for a range of materials, different cantilever geometries as well as for single and multilayer materials. It was found that both methods produce results that agree with each other and also agree with the values most often given in the literature.

Item type:Article
ID code:36626
Keywords:Young’s modulus, elastic modulus, MEMS, micro-cantilevers, resonant frequency , load-deflection method, mechanical characterisation, Electrical engineering. Electronics Nuclear engineering, Instrumentation, Surfaces, Coatings and Films, Metals and Alloys, Electronic, Optical and Magnetic Materials, Electrical and Electronic Engineering, Condensed Matter Physics
Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
Department:Faculty of Engineering > Electronic and Electrical Engineering
Depositing user: Pure Administrator
Date deposited:11 Jan 2012 14:20
Last modified:03 Jan 2019 13:13
Related URLs:
URI:https://strathprints.strath.ac.uk/id/eprint/36626
Export data:
CORE (COnnecting REpositories)