Direct comparison of stylus and resonant methods for determining Young's modulus of single and multilayer MEMS cantilevers

Boyd, Euan and Nock, Volker and Weiland, Dominik and Li, Xudong and Uttamchandani, Deepak (2011) Direct comparison of stylus and resonant methods for determining Young's modulus of single and multilayer MEMS cantilevers. Sensors and Actuators A: Physical, 172 (2). pp. 440-446. ISSN 0924-4247 (https://doi.org/10.1016/j.sna.2011.09.022)

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Abstract

As microelectromechanical systems (MEMS) become more complex and is produced in even greater numbers it becomes increasingly important to have a full understanding of the mechanical properties of the commonly used MEMS materials. One of the most important properties for MEMS is the Young’s modulus. This work describes the direct comparison of two methods often used for measuring the Young’s modulus of thin film materials using micro-cantilever test structures: a load-deflection method and a resonant frequency method. The comparison was carried out for a range of materials, different cantilever geometries as well as for single and multilayer materials. It was found that both methods produce results that agree with each other and also agree with the values most often given in the literature.

ORCID iDs

Boyd, Euan, Nock, Volker, Weiland, Dominik, Li, Xudong and Uttamchandani, Deepak ORCID logoORCID: https://orcid.org/0000-0002-2362-4874;
  • Item type:Article
    ID code:36626
    Dates:
    Date
    Event
    1 December 2011
    Published
    30 September 2011
    Published Online
    Keywords:Young’s modulus, elastic modulus, MEMS, micro-cantilevers, resonant frequency , load-deflection method, mechanical characterisation, Electrical Engineering. Electronics Nuclear Engineering, Instrumentation, Surfaces, Coatings and Films, Metals and Alloys, Electronic, Optical and Magnetic Materials, Electrical and Electronic Engineering, Condensed Matter Physics
    Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
    Department:Faculty of Engineering > Electronic and Electrical Engineering
    Depositing user: Pure Administrator
    Date deposited:11 Jan 2012 14:20
    Last modified:02 Dec 2022 01:36
    Related URLs:
    URI:https://strathprints.strath.ac.uk/id/eprint/36626
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