Silicon for thin-film transistors

Wagner, S. and Gleskova, Helena and Cheng, I. C. and Wu, M.; Schropp, Ruud E. I. and Schubert, Markus B., eds. (2003) Silicon for thin-film transistors. In: Proceedings of the Second International Conference on Cat-CVD (Hot-Wire CVD) Process. Elsevier, USA, pp. 1-6.

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Abstract

This chapter looks at silicon for thin-film transistors.

ORCID iDs

Wagner, S., Gleskova, Helena ORCID logoORCID: https://orcid.org/0000-0001-7195-9639, Cheng, I. C. and Wu, M.; Schropp, Ruud E. I. and Schubert, Markus B.