a-Si:H TFTs made on polyimide foil by PECVD at 150ºC

Gleskova, Helena and Wagner, S. and Suo, Z. (1998) a-Si:H TFTs made on polyimide foil by PECVD at 150ºC. In: Flat panel display materials - 1998. MRS Symposium Proceedings, 508 . Materials Research Society, USA, pp. 73-78. ISBN 9781558994140

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Abstract

This chapter looks at a-Si:H TFTs made on polyimide foil by PECVD at 150ºC