Electrical stability of a-Si:H TFTs fabricated at 150ºC

Gleskova, Helena and Wagner, S.; Stutzmann, M. and Boyce, J. B. and Cohen, J. D. and Collins, R. W. and Hanna, J., eds. (2001) Electrical stability of a-Si:H TFTs fabricated at 150ºC. In: Amorphous and heterogeneous silicon-based films – 2001. MRS Symposium Proceedings, 664 . Materials Research Society, USA, A19.7.1-A19.7.6. ISBN 9781558996007

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Abstract

This chapter looks at electrical stability of a-Si:H TFTs fabricated at 150ºC

ORCID iDs

Gleskova, Helena ORCID logoORCID: https://orcid.org/0000-0001-7195-9639 and Wagner, S.; Stutzmann, M., Boyce, J. B., Cohen, J. D., Collins, R. W. and Hanna, J.