CO2 laser annealing of Al/a-Si:H contact

Gleskova, Helena and Ilchenko, V. V. and Skryshevsky, V. A. and Strikha, V. I. (1993) CO2 laser annealing of Al/a-Si:H contact. Czechoslovak Journal of Physics, 43 (2). pp. 169-178. ISSN 0011-4626 (https://doi.org/10.1007/BF01589639)

Abstract

he paper concerns the possibility of using CW (continuous wave) CO2-laser annealing (λ=10.6 μm, P≤ 100 W/cm2) for formation of a barrier in the Al/a-Si:H/SS (SS-stainless steel) structures with good rectifying I V characteristics. The infrared absorption spectra, photoelectric properties, temperature effect on the conductivity and saturation current were analyzed and various contact models are discussed.

ORCID iDs

Gleskova, Helena ORCID: https://orcid.org/0000-0001-7195-9639

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• Item metadata

  Item type:	Article
  ID code:	33423
  Dates:	Date Event 1993 Published
  Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering
  Department:	Faculty of Engineering > Electronic and Electrical Engineering
  Depositing user:	Pure Administrator
  Date deposited:	13 Oct 2011 13:52
  Last modified:	11 Nov 2024 09:50
  URI:	https://strathprints.strath.ac.uk/id/eprint/33423