Novel processing technology for microelectronics

Wagner, S. and Gleskova, Helena and Sturm, J. C. and Suo, Z.; Street, R. A., ed. (2000) Novel processing technology for microelectronics. In: Technology and applications of hydrogenated amorphous silicon. Materials Science, 37 . Springer, Berlin, Germany, pp. 222-251. ISBN 9783540657149

ORCID iDs

Gleskova, Helena ORCID: https://orcid.org/0000-0001-7195-9639

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• Item metadata

  Item type:	Book Section
  ID code:	33405
  Dates:	Date Event 2000 Published
  Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering
  Department:	Faculty of Engineering > Electronic and Electrical Engineering
  Depositing user:	Pure Administrator
  Date deposited:	01 Nov 2011 14:23
  Last modified:	11 Nov 2024 14:44
  Related URLs:	Publisher
  URI:	https://strathprints.strath.ac.uk/id/eprint/33405