Edwards, Paul R and Martin, Robert W (2011) Cathodoluminescence nano-characterization of semiconductors. Semiconductor Science and Technology, 26 (6). 064005.Full text not available in this repository. (Request a copy from the Strathclyde author)
We give an overview of the use of cathodoluminescence (CL) in scanning electron microscopy (SEM) for the nano-scale characterization of semiconducting materials and devices. We discuss the technical aspects of the measurement, such as factors limiting the spatial resolution and design considerations for efficient collection optics. The advantages of more recent developments in the technique are outlined, including the use of the hyperspectral imaging mode and the combination of CL and other SEM-based measurements. We illustrate these points with examples from our own experience of designing and constructing CL systems and applying the technique to the characterization of III-nitride materials and nanostructures.
|Keywords:||optics, condensed matter, electrical matter, magnetic matter, thin films, cathodoluminescence, ionoluminescence , Physics|
|Subjects:||Science > Physics|
|Department:||Faculty of Science > Physics|
?? 120 ??
?? 122 ??
|Depositing user:||Pure Administrator|
|Date Deposited:||10 May 2011 10:18|
|Last modified:||12 Jun 2013 16:10|
Actions (login required)