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Cathodoluminescence nano-characterization of semiconductors

Edwards, Paul R and Martin, Robert W (2011) Cathodoluminescence nano-characterization of semiconductors. Semiconductor Science and Technology, 26 (6). 064005.

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Abstract

We give an overview of the use of cathodoluminescence (CL) in scanning electron microscopy (SEM) for the nano-scale characterization of semiconducting materials and devices. We discuss the technical aspects of the measurement, such as factors limiting the spatial resolution and design considerations for efficient collection optics. The advantages of more recent developments in the technique are outlined, including the use of the hyperspectral imaging mode and the combination of CL and other SEM-based measurements. We illustrate these points with examples from our own experience of designing and constructing CL systems and applying the technique to the characterization of III-nitride materials and nanostructures.

Item type: Article
ID code: 30546
Keywords: optics, condensed matter, electrical matter, magnetic matter, thin films, cathodoluminescence, ionoluminescence , Physics, Materials Chemistry, Electronic, Optical and Magnetic Materials, Electrical and Electronic Engineering, Condensed Matter Physics
Subjects: Science > Physics
Department: Faculty of Science > Physics
Technology and Innovation Centre > Bionanotechnology
Technology and Innovation Centre > Photonics
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Depositing user: Pure Administrator
Date Deposited: 10 May 2011 10:18
Last modified: 27 Mar 2014 09:19
URI: http://strathprints.strath.ac.uk/id/eprint/30546

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