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Conference or Workshop Item
Stonehouse, Mark and Zhang, Yanchao and Guilhabert, Benoit and Watson, Ian and Gu, Erdan and Herrnsdorf, Johannes and Dawson, Martin (2018) Digital illumination in microscale direct-writing photolithography : challenges and trade-off. In: IEEE British and Irish Conference on Optics and Photonics, 2018-12-12 - 2018-12-14.