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Selective wet etching of lattice-matched AlInN-GaN heterostructures

Rizzi, F. and Bejtka, K. and Edwards, P.R. and Martin, R.W. and Watson, I.M. (2007) Selective wet etching of lattice-matched AlInN-GaN heterostructures. Journal of Crystal Growth, 300 (1). pp. 254-258. ISSN 0022-0248

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Abstract

Wet etching of AlInN-GaN epitaxial heterostructures, containing AlInN layers with InN mole fractions close to 0.17 has been studied. One molar aqueous solution of the chelating amine 1,2-diaminoethane (DAE) proved to selectively etch the AlInN layers, without the need for heating above room temperature, or photo-assistance. In experiments with a (0 0 0 1)-oriented AlInN-on-GaN bilayer, the mode of removal of the AlInN layer was predominantly lateral etching, initiated from the sidewalls of pit defects in the AlInN layer. The lateral etch rate was estimated at 60 nm/h. The GaN buffer layer surface was roughened concurrently with etching of the AlInN, although the DAE solution has no effect on as-grown GaN (0 0 0 1) surfaces. The roughening of the GaN surface is tentatively attributed to the charge accumulation layer expected at the AlInN-GaN heterointerface. The DAE etchant also proved effective at removing buried AlInN layers from trilayer and more complex multilayer structures, leading to the prospect of epitaxial lift-off processes, and the fabrication of three-dimensional engineered microstructures. These capabilities were demonstrated by the production of suspended microdisk structures from a GaN-AlInN-GaN trilayer, using a combination of dry and wet etching.

Item type: Article
ID code: 9069
Keywords: etching, metalorganic vapor phase epitaxy, nitrides, semiconducting III–V materials, Optics. Light, Materials Chemistry, Inorganic Chemistry, Condensed Matter Physics
Subjects: Science > Physics > Optics. Light
Department: Faculty of Science > Institute of Photonics
Faculty of Science > Physics
Related URLs:
    Depositing user: Strathprints Administrator
    Date Deposited: 31 Oct 2009 14:20
    Last modified: 04 Sep 2014 21:13
    URI: http://strathprints.strath.ac.uk/id/eprint/9069

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