Picture of athlete cycling

Open Access research with a real impact on health...

The Strathprints institutional repository is a digital archive of University of Strathclyde's Open Access research outputs. Strathprints provides access to thousands of Open Access research papers by Strathclyde researchers, including by researchers from the Physical Activity for Health Group based within the School of Psychological Sciences & Health. Research here seeks to better understand how and why physical activity improves health, gain a better understanding of the amount, intensity, and type of physical activity needed for health benefits, and evaluate the effect of interventions to promote physical activity.

Explore open research content by Physical Activity for Health...

In-rich AlxIn1−xN grown by RF-sputtering on sapphire : from closely-packed columnar to high-surface quality compact layers

Núñez-Cascajero, A and Valdueza-Felip, S and Monteagudo-Lerma, L and Monroy, E and Taylor-Shaw, E and Martin, R W and González-Herráez, M and Naranjo, F B (2017) In-rich AlxIn1−xN grown by RF-sputtering on sapphire : from closely-packed columnar to high-surface quality compact layers. Journal of Physics D: Applied Physics, 50 (6). ISSN 0022-3727

[img] Text (Nunez-Cascajero-JPD-2017-In-rich-AlxIn1-xN-grown-by-RF-sputtering-on-sapphire)
Nunez_Cascajero_JPD_2017_In_rich_AlxIn1_xN_grown_by_RF_sputtering_on_sapphire.pdf - Accepted Author Manuscript
Restricted to Repository staff only until 14 December 2017.

Download (1MB) | Request a copy from the Strathclyde author


The structural, morphological, electrical and optical properties of In-rich AlxIn1−xN(0 < x < 0.39) layers grown by reactive radio-frequency (RF) sputtering on sapphire areinvestigated as a function of the deposition parameters. The RF power applied to the aluminumtarget (0 W–150 W) and substrate temperature (300 °C–550 °C) are varied. X-ray diffractionmeasurements reveal that all samples have a wurtzite crystallographic structure oriented withthe c-axis along the growth direction. The aluminum composition is tuned by changing thepower applied to the aluminum target while keeping the power applied to the indium targetfixed at 40 W. When increasing the Al content from 0 to 0.39, the room-temperature opticalband gap is observed to blue-shift from 1.76 eV to 2.0 eV, strongly influenced by the Burstein–Moss effect. Increasing the substrate temperature, results in an evolution of the morphologyfrom closely-packed columnar to compact. For a substrate temperature of 500 °C and RFpower for Al of 150 W, compact Al0.39In0.61N films with a smooth surface (root-mean-squaresurface roughness below 1 nm) are produced.