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2002
Yao, J. and Uttamchandani, D.G. and Zhang, Y. and Guo, Y. and Cui, Z. (2002) One-step lithography for fabrication of a hybrid microlens array using a coding grey-level mask. In: Conference on MEMS/MOEMS - Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly, 2002-10-28 - 2002-10-29.