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McGilligan, James P. and Dyer, Sean and Griffin, Paul F. and Arnold, Aidan S. and Riis, Erling; Scheuer, Jacob and Shahriar, Selim M., eds. (2023) Deep silicon cell fabrication for chip-scale atomic sensors. In: Quantum Sensing, Imaging, and Precision Metrology. Proceedings of SPIE - The International Society for Optical Engineering . SPIE, USA. ISBN 9781510659995

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