External linearisation of a MEMS electrothermal scanner with application in a confocal microscope
Poland, S.P. and Girkin, J.M. and Li, L. and Uttamchandani, D.G. (2009) External linearisation of a MEMS electrothermal scanner with application in a confocal microscope. Micro and Nano Letters, 4 (2). pp. 106-111. ISSN 1750-0443
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A compensatory mapping (CM) technique for external linearisation of a MEMS electrothermally actuated optical scanner is reported. Each individual axis of a two-axis MEMS scanner was linearised by the CM technique, and the scanner was then incorporated into a confocal optical microscope configuration. Cross-talk in the scanner when both axes are driven simultaneously, and arising when a drive signal to one axis of the scanner produces a mechanical response in the orthogonal scan axis, was subsequently compensated for by using a look-up-table optimised using a random search algorithm.
Creators(s): |
Poland, S.P., Girkin, J.M., Li, L. and Uttamchandani, D.G. ![]() | Item type: | Article |
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ID code: | 9100 |
Keywords: | external linearisation, compensatory mapping technique, MEMS electrothermal actuated optical scanner, two-axis MEMS scanner, confocal optical microscope configuration, lookup-table, random search algorithm, linearisation techniques, micromechanical devices, optical microscopes, optical scanners, random processes, Optics. Light, Electrical engineering. Electronics Nuclear engineering, Physics, Biomedical Engineering, Bioengineering, Materials Science(all), Condensed Matter Physics |
Subjects: | Science > Physics > Optics. Light Technology > Electrical engineering. Electronics Nuclear engineering Science > Physics |
Department: | Faculty of Science > Physics > Institute of Photonics Faculty of Engineering > Electronic and Electrical Engineering |
Depositing user: | Strathprints Administrator |
Date deposited: | 10 Nov 2009 09:44 |
Last modified: | 20 Jan 2021 18:00 |
URI: | https://strathprints.strath.ac.uk/id/eprint/9100 |
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