External linearisation of a MEMS electrothermal scanner with application in a confocal microscope

Poland, S.P. and Girkin, J.M. and Li, L. and Uttamchandani, D.G. (2009) External linearisation of a MEMS electrothermal scanner with application in a confocal microscope. Micro and Nano Letters, 4 (2). pp. 106-111. ISSN 1750-0443

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Official URL: http://dx.doi.org/10.1049/mnl.2009.0018

Abstract

A compensatory mapping (CM) technique for external linearisation of a MEMS electrothermally actuated optical scanner is reported. Each individual axis of a two-axis MEMS scanner was linearised by the CM technique, and the scanner was then incorporated into a confocal optical microscope configuration. Cross-talk in the scanner when both axes are driven simultaneously, and arising when a drive signal to one axis of the scanner produces a mechanical response in the orthogonal scan axis, was subsequently compensated for by using a look-up-table optimised using a random search algorithm.

Creators(s):	Poland, S.P., Girkin, J.M., Li, L. and Uttamchandani, D.G. ORCID: https://orcid.org/0000-0002-2362-4874;
Item type:	Article
ID code:	9100
Keywords:	external linearisation, compensatory mapping technique, MEMS electrothermal actuated optical scanner, two-axis MEMS scanner, confocal optical microscope configuration, lookup-table, random search algorithm, linearisation techniques, micromechanical devices, optical microscopes, optical scanners, random processes, Optics. Light, Electrical engineering. Electronics Nuclear engineering, Physics, Biomedical Engineering, Bioengineering, Materials Science(all), Condensed Matter Physics
Subjects:	Science > Physics > Optics. Light Technology > Electrical engineering. Electronics Nuclear engineering Science > Physics
Department:	Faculty of Science > Physics > Institute of Photonics Faculty of Engineering > Electronic and Electrical Engineering
Depositing user:	Strathprints Administrator
Date deposited:	10 Nov 2009 09:44
Last modified:	27 Feb 2020 01:55
URI:	https://strathprints.strath.ac.uk/id/eprint/9100
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