Microfabrication of free-standing gallium nitride using UV laser micromachining

Gu, E. and Howard, H. and Conneely, A. and O'Connor, G.M. and Edwards, P.R. and Martin, R.W. and Dawson, M.D. (2005) Microfabrication of free-standing gallium nitride using UV laser micromachining. In: European Materials Research Society 2005 Spring Meeting, 2005-05-31 - 2005-06-03. (Unpublished)

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Abstract

This paper is about microfabrication of free-standing gallium nitride using UV laser micromachining. It was presented at the 2005 European materials research society sprint meeting.

ORCID iDs

Gu, E. ORCID logoORCID: https://orcid.org/0000-0002-7607-9902, Howard, H., Conneely, A., O'Connor, G.M., Edwards, P.R. ORCID logoORCID: https://orcid.org/0000-0001-7671-7698, Martin, R.W. ORCID logoORCID: https://orcid.org/0000-0002-6119-764X and Dawson, M.D. ORCID logoORCID: https://orcid.org/0000-0002-6639-2989;
  • Item type:Conference or Workshop Item(Paper)
    ID code:9039
    Dates:
    Date
    Event
    3 June 2005
    Published
    Notes:Also available as an article at strathprints http://strathprints.strath.ac.uk/5264/
    Keywords:microfabrication, free-standing gallium nitride, gallium nitride, UV laser, laser micromachining, lasers, Optics. Light
    Subjects:Science > Physics > Optics. Light
    Department:Faculty of Science > Physics > Institute of Photonics
    Faculty of Science > Physics
    Depositing user: Strathprints Administrator
    Date deposited:17 Nov 2009 12:32
    Last modified:10 Mar 2021 01:30
    Related URLs:
    URI:https://strathprints.strath.ac.uk/id/eprint/9039
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