Microfabrication of free-standing gallium nitride using UV laser micromachining

Gu, E. and Howard, H. and Conneely, A. and O'Connor, G.M. and Edwards, P.R. and Martin, R.W. and Dawson, M.D. (2005) Microfabrication of free-standing gallium nitride using UV laser micromachining. In: European Materials Research Society 2005 Spring Meeting, 2005-05-31 - 2005-06-03. (Unpublished)

Abstract

This paper is about microfabrication of free-standing gallium nitride using UV laser micromachining. It was presented at the 2005 European materials research society sprint meeting.

ORCID iDs

Gu, E. ORCID: https://orcid.org/0000-0002-7607-9902

Edwards, P.R. ORCID: https://orcid.org/0000-0001-7671-7698

Martin, R.W. ORCID: https://orcid.org/0000-0002-6119-764X

Dawson, M.D. ORCID: https://orcid.org/0000-0002-6639-2989

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• Item metadata

  Item type:	Conference or Workshop Item(Paper)
  ID code:	9039
  Dates:	Date Event 3 June 2005 Published
  Notes:	Also available as an article at strathprints http://strathprints.strath.ac.uk/5264/
  Keywords:	microfabrication, free-standing gallium nitride, gallium nitride, UV laser, laser micromachining, lasers, Optics. Light
  Subjects:	Science > Physics > Optics. Light
  Department:	Faculty of Science > Physics > Institute of Photonics Faculty of Science > Physics
  Depositing user:	Strathprints Administrator
  Date deposited:	17 Nov 2009 12:32
  Last modified:	18 Jan 2023 12:57
  Related URLs:	Event
  URI:	https://strathprints.strath.ac.uk/id/eprint/9039