Anisotropic effects in local anodic oxidation nanolithography on silicon surfaces : insights from ReaxFF molecular dynamics
Gao, Jian and Xie, Wenkun and Luo, Xichun and Qin, Yi and Zhao, Zhiyong (2024) Anisotropic effects in local anodic oxidation nanolithography on silicon surfaces : insights from ReaxFF molecular dynamics. Langmuir, 40 (30). 15530−15540. ISSN 0743-7463 (https://doi.org/10.1021/acs.langmuir.4c01129)
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Abstract
Fully understanding the anisotropic effect of silicon surface orientations in local anodic oxidation (LAO) nanolithography processes is critical to the precise control of oxide quality and rate. This study used ReaxFF MD simulations to reveal the surface anisotropic effects in the LAO through the analysis of adsorbed species, atomic charge, and oxide growth. Our results show that the LAO behaves differently on silicon (100), (110), and (111) surfaces. Specifically, the application of an electric field significantly increases the quantity of surface-adsorbed –OH2 while reducing –OH on the (111) surface, and results in a higher charge on a greater number of Si atoms on the (100) surface. Moreover, the quantity of surface-adsorbed –OH plays a pivotal role in influencing the oxidation rate, as it directly correlates with an increased formation rate of Si–O–Si bonds. During bias-induced oxidation, (111) surface appears with high initial oxidation rate among three surfaces, attributed to a high atomic density, while (110) surface underwent increased oxidation at higher electric field strengths through the analysis of the evolution of Si–O–Si bond number, surface elevation, and oxide thickness. Our findings align well with prior theoretical and experimental studies, providing deeper insights and clear guidance for the fabrication of high-performance nano-insulator gates using LAO nanolithography.
ORCID iDs
Gao, Jian ORCID: https://orcid.org/0000-0001-7740-5274, Xie, Wenkun ORCID: https://orcid.org/0000-0002-5305-7356, Luo, Xichun ORCID: https://orcid.org/0000-0002-5024-7058, Qin, Yi ORCID: https://orcid.org/0000-0001-7103-4855 and Zhao, Zhiyong ORCID: https://orcid.org/0009-0006-1457-1359;-
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Item type: Article ID code: 89863 Dates: DateEvent30 July 2024Published15 July 2024Published Online2 July 2024Accepted7 March 2024SubmittedSubjects: Technology > Engineering (General). Civil engineering (General) > Engineering design Department: Faculty of Engineering > Design, Manufacture and Engineering Management
Technology and Innovation Centre > Advanced Engineering and ManufacturingDepositing user: Pure Administrator Date deposited: 08 Jul 2024 14:07 Last modified: 11 Oct 2024 16:09 URI: https://strathprints.strath.ac.uk/id/eprint/89863